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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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David, Christian
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Topics
Publications (9/9 displayed)
- 2023Directly observing atomic-scale relaxations of a glass forming liquid using femtosecond X-ray photon correlation spectroscopycitations
- 2023Hard X-ray stereographic microscopy for single-shot differential phase imagingcitations
- 2022Microstructure effects on the phase transition behavior of a prototypical quantum materialcitations
- 2019Fabrication of Au gratings by seedless electroplating for X-ray grating interferometrycitations
- 2015Mapping the morphological changes of deposited gold nanoparticles across an imprinted groovecitations
- 2014Halo suppression in full-field x-ray Zernike phase contrast microscopycitations
- 2010Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive X-ray optics fabricationcitations
- 2009Advanced thin film technology for ultrahigh resolution x-ray microscopycitations
- 2007Modification of the porous network by salt crystallization in experimentally weathered sedimentary stonescitations
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article
Advanced thin film technology for ultrahigh resolution x-ray microscopy
Abstract
Further progress in the spatial resolution of X-ray microscopes is currently impaired by fundamental limitations in the production of X-ray diffractive lenses. Here, we demonstrate how advanced thin film technologies can be applied to boost the fabrication and characterization of ultrahigh resolution X-ray optics. Specifically, Fresnel zone plates were fabricated by combining electron-beam lithography with atomic layer deposition and focused ion beam induced deposition. They were tested in a scanning transmission X-ray microscope at 1.2 keV photon energy using line pair structures of a sample prepared by metalorganic vapor phase epitaxy. For the first time in X-ray microscopy, features below 10nm in width were resolved. (C) 2009 Elsevier B.V. All rights reserved.