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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Allen, Leslie
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2010Elemental mapping in scanning transmission electron microscopycitations
- 2009Quantitative comparisons of contrast in experimental and simulated bright-field scanning transmission electron microscopy imagescitations
- 2009Theory of dynamical scattering in near-edge electron energy loss spectroscopycitations
- 2008Depth sectioning using electron energy loss spectroscopycitations
- 2008Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part II: Inelastic scatteringcitations
- 2008Volcano structure in atomic resolution core-loss imagescitations
- 2007Interpreting atomic-resolution spectroscopic imagescitations
- 2007Imaging using inelastically scattered electrons in CTEM and STEM geometrycitations
- 2007Depth sectioning in scanning transmission electron microscopy based on core-loss spectroscopycitations
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article
Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part II: Inelastic scattering
Abstract
The implementation of spherical aberration-corrected pre- and post-specimen lenses in the same instrument has facilitated the creation of sub-??ngstrom electron probes and has made aberration-corrected scanning confocal electron microscopy (SCEM) possible. Further to the discussion of elastic SCEM imaging in our previous paper, we show that by performing a 3D raster scan through a crystalline sample using inelastic SCEM imaging it will be possible to determine the location of isolated impurity atoms embedded within a bulk matrix. In particular, the use of electron energy loss spectroscopy based on inner-shell ionization to uniquely identify these atoms is explored. Comparisons with scanning transmission electron microscopy (STEM) are made showing that SCEM will improve both the lateral and depth resolution relative to STEM. In particular, the expected poor resolution of STEM depth sectioning for extended objects is overcome in the SCEM geometry.