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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Florian, Pierre
Conditions Extrêmes et Matériaux Haute Température et Irradiation
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Structure and properties of gallate and germanate langasite infrared optical glass materialscitations
- 2023Resolved-detrimental langasite-type surface crystallization in yttrium lanthanum gallium-rich heavy metal oxide glasses for infra-red optical fiber applications
- 2023Resolved‐detrimental surface crystallization in yttrium lanthanum gallate glasses for optical fiber applicationscitations
- 2023A robust ultra-microporous cationic aluminum-based metal-organic framework with a flexible tetra-carboxylate linkercitations
- 2023A Robust Ultra-microporous Cationic Aluminiumbased Metal-Organic Framework with a Flexible Tetra-carboxylate Linkercitations
- 2022Structure and related properties of amorphous magnesium aluminosilicatescitations
- 2022Structure and related properties of amorphous magnesium aluminosilicatescitations
- 2021Beyond surface nanoindentation: Combining static and dynamic nanoindentation to assess intrinsic mechanical properties of chemical vapor deposition amorphous silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin filmscitations
- 201717 O NMR evidence of free ionic clusters Mn+ CO3 2− in silicate glasses: Precursors for carbonate-silicate liquids immiscibilitycitations
- 2016Modifier cation effects on 29Si nuclear shielding anisotropies in silicate glassescitations
- 2015Calcium environment in silicate and aluminosilicate glasses Probed by 43Ca MQMAS NMR Experiments and MD-GIPAW calculationscitations
- 2015Calcium environment in silicate and aluminosilicate glasses Probed by $^{43}$Ca MQMAS NMR experiments and MD-GIPAW calculationscitations
- 2014Temperature Dependent 4-, 5- and 6-Fold Coordination of Aluminum in MOCVD-Grown Amorphous Alumina Films: From Local Coordination to Material Propertiescitations
- 2013Phase Separation and Spatial Morphology in Sodium Silicate Glasses by AFM, Light Scattering and NMRcitations
- 2013Temperature-Dependent 4‑, 5- and 6‑Fold Coordination of Aluminum in MOCVD-Grown Amorphous Alumina Films: A Very High Field 27Al-NMR studycitations
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article
Beyond surface nanoindentation: Combining static and dynamic nanoindentation to assess intrinsic mechanical properties of chemical vapor deposition amorphous silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin films
Abstract
Nanoindentation is a well-known technique to assess the mechanical properties of bulk materials and films. Despite that, nanoindentation of thin films is not straightforward, given that the measured properties are composite information from a film/substrate system and depend on the indentation depth. By using dynamic indentation experiments and analytical or empirical models, we assessed the intrinsic film properties of chemical vapor deposited silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin films with thicknesses ranging from 60 to 700 nm. In this work, the Bec rheological model and several mixing laws were reviewed. Measured Young modulus appeared to be affected by the substrate properties more than hardness: for the thinnest films, moduli were measured at ca. 90 GPa whereas intrinsic moduli were calculated at ca. 50 GPa. Using calculated intrinsic film modulus and hardness, it was possible to establish correlations between these properties, the chemical composition and the structural organization of the films.