693.932 PEOPLE
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| Naji, M. |
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Caussat, Brigitte
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Topics
Publications (38/38 displayed)
- 2024Fluidized bed chemical vapor deposition of copper on micronic alumina powders
- 2024Catalytic atomic layer deposition of amorphous alumina–silica thin films on carbon microfiberscitations
- 2024Comparative analysis of structural characteristics and thermal insulation properties of ZrO2 thin films deposited via chemical and physical vapor phase processescitations
- 2023Photo-electrocatalytic performance of poly(3,4-ethylenedioxythiophene)/TiO2 nano-tree films deposited by oCVD/CVD for H2 productioncitations
- 2023Corrosion barrier alumina/zirconia bilayer stack on low Cr steel by direct liquid injection metalorganic chemical vapor depositioncitations
- 2023Single-Step PEDOT deposition by oxidative chemical vapor deposition for opto-electronic applications
- 2023Single-Step PEDOT Deposition by oCVD for ITO-Free Deep Blue OLEDscitations
- 2023Single-Step PEDOT Deposition by oCVD for ITO-Free Deep Blue OLEDscitations
- 2023Silicon Oxynitride Coatings Are Very Promising for Inert and Durable Pharmaceutical Glass Vialscitations
- 2023Amorphous Alumina Thin Films Deposited on Carbon Microfibers As Interface Layer for Thermal Oxidation Barrierscitations
- 2021Beyond surface nanoindentation: Combining static and dynamic nanoindentation to assess intrinsic mechanical properties of chemical vapor deposition amorphous silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin filmscitations
- 2021Barrier properties and hydrothermal aging of amorphous alumina coatings applied on pharmaceutical vialscitations
- 2021Liquid antimony pentachloride as oxidant for robust oxidative chemical vapor deposition of Poly(3,4-ethylenedioxythiophene) filmscitations
- 2020An out of the box vision over oxidative chemical vapor deposition of PEDOT involving sublimed iron trichloridecitations
- 2017Synthesis and electrical characterization of monocrystalline nickel nanorods and Ni-CNT composites
- 2017Fluidized bed chemical vapor deposition of copper nanoparticles on multiwalled carbon nanotubescitations
- 2016Mixed diazonium/PEDOT-functionalized graphene electrode for antioxidant biomarkers detection: proof-of-concept for integration on silicon substrate
- 2016Amorphous Alumina Barrier Coatings on Glass: MOCVD Process and Hydrothermal Ageingcitations
- 2015Fluidized-Bed Chemical Vapor Deposition of Silicon on Very Dense Tungsten Powdercitations
- 2015Modeling a MOCVD process to apply alumina films on the inner surface of bottlescitations
- 2015Modeling a MOCVD process to apply alumina films on the inner surface of bottlescitations
- 2015Silicon coating on very dense tungsten particles by fluidized bed CVD for nuclear applicationcitations
- 2015Silicon coating on very dense tungsten particles by fluidized bed CVD for nuclear applicationcitations
- 2015Liquid and Solid Precursor Delivery Systems in Gas Phase Processescitations
- 2015Alumina thin films prepared by direct liquid injection chemical vapor deposition of dimethylaluminum isopropoxide: a process-structure investigationcitations
- 2015Effects of reducing the reactor diameter on the fluidization of a very dense powdercitations
- 2015New insight into carbon nanotubes synthesis from an original Pt/Ti alloy by catalytic chemical vapor deposition
- 2015Process-structure-properties relationship in direct liquid injection chemical vapor deposition of amorphous alumina from aluminum tri-isopropoxidecitations
- 2014Amorphous alumina coatings on glass bottles using direct liquid injection MOCVD for packaging applicationscitations
- 2014Amorphous alumina coatings on glass bottles using direct liquid injection MOCVD for packaging applicationscitations
- 2013Fluidization and coating of very dense powders by fluidized bed chemical vapour deposition.citations
- 2012Silicon nanoparticle/carbon nanotube composites for LI-ION battery anodes
- 2011SUBLIBOX: A Proprietary Solvent Free Method for Intense Vaporization of Solid Compounds
- 2011Alumina coating on dense tungsten powder by fluidized bed metal organic chemical vapour depositioncitations
- 2011Fluidization and coating of very dense powders by Fluidized Bed CVD
- 2011Amorphous alumina coatings: processing, structure and remarkable barrier propertiescitations
- 2006Hydrodynamic study of fine metallic powders in an original spouted bed contactor in view of chemical vapor deposition treatmentscitations
- 2006Principles and applications of CVD powder technologycitations
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article
Beyond surface nanoindentation: Combining static and dynamic nanoindentation to assess intrinsic mechanical properties of chemical vapor deposition amorphous silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin films
Abstract
Nanoindentation is a well-known technique to assess the mechanical properties of bulk materials and films. Despite that, nanoindentation of thin films is not straightforward, given that the measured properties are composite information from a film/substrate system and depend on the indentation depth. By using dynamic indentation experiments and analytical or empirical models, we assessed the intrinsic film properties of chemical vapor deposited silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin films with thicknesses ranging from 60 to 700 nm. In this work, the Bec rheological model and several mixing laws were reviewed. Measured Young modulus appeared to be affected by the substrate properties more than hardness: for the thinnest films, moduli were measured at ca. 90 GPa whereas intrinsic moduli were calculated at ca. 50 GPa. Using calculated intrinsic film modulus and hardness, it was possible to establish correlations between these properties, the chemical composition and the structural organization of the films.