| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Minea, Tiberiu
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2024Vapor chemical composition in Electron Beam Powder Bed Fusion using Ti-6Al-4V powder
- 2023Impact of self-sputtering in high power impulse magnetron sputtering (HiPIMS) with heliumcitations
- 2023Spatiotemporal characterization of evaporated atoms during electron beam melting additive manufacturing by advanced laser diagnosticscitations
- 2023The Use of Sacrificial Graphite-like Coating to Improve Fusion Efficiency of Copper in Selective Laser Meltingcitations
- 2022Saturation pressure of nonequilibrium titanium evaporation during additive manufacturing by electron powder bed fusioncitations
- 2022Saturation pressure of nonequilibrium titanium evaporation during additive manufacturing by electron powder bed fusioncitations
- 2021Modeling of high power impulse magnetron sputtering discharges with graphite targetcitations
- 2021Behavior of high current density pulsed magnetron discharge with a graphite targetcitations
- 2021Phototribology: control of friction by lightcitations
- 2020Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on coppercitations
- 2019Tuning high power impulse magnetron sputtering discharge and substrate bias conditions to reduce the intrinsic stress of TiN thin filmscitations
- 2018Influence of backscattered neutrals on the grain size of magnetron-sputtered TaN thin filmscitations
- 2017Benefits of energetic ion bombardment for tailoring stress and microstructural evolution during growth of Cu thin filmscitations
- 2017Epitaxial growth of Cu(001) thin films onto Si(001) using a single-step HiPIMS processcitations
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article
Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copper
Abstract
International audience ; Amorphous carbon-based coatings deposited on copper substrates by magnetron sputtering at different target to -substrate distances were investigated. Films deposited at short distances as 2 cm presented the best results in terms of morphology, density, and resistivity. Ultraviolet near-infrared range spectrometry measurements determined total reflectance and ellipsometry, extinction coefficient, refraction index, and pseudo bandgap. Amorphous carbon films of 150 nm deposited at 2 cm reduced the total reflectance by up to 60 ± 5% in the near-in-fra-red range when compared to pure copper films. The addition of Fe*boosts the absorption of the coating reducing the total reflectance by up to 70 ± 5% in near-infrared. (Fe*: deposited from stainless-steel target used in direct-current magnetron sputtering). Also, it reduces the electrical resistivity by a factor of 100 compared to that of pure amorphous carbon films. The reduction in total reflectance induced by the presence of the amorphous carbon-based films on copper depends, as expected, on light penetration depth and the absorption coefficient.