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Martin, Nicolas
Laboratoire Bourguignon des Matériaux et Procédés
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (79/79 displayed)
- 2024A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
- 2024Titanium oxynitride thin films by the reactive sputtering process with an independent pulsing of O2 and N2 gases
- 2023Tantalum Oxide Thin Films Sputter-Deposited by Oxygen Gas Pulsingcitations
- 2023Evaluation of frictional anisotropy of metallic thin films deposited by GLAD
- 2022Anisotropic thermal conductivity of nanocolumnar W thin films
- 2022Anisotropic thermal conductivity of nanocolumnar W thin films
- 2022Structural and electrical properties of nanocolumnar W-Mo thin films with a Janus-like structurecitations
- 2022Oblique angle co-deposition of nanocolumnar tungsten thin films with two W sources: Effect of pressure and target currentcitations
- 2022Zr3Mn3Sn4Ga : a new hexagonal Ti6Sn5 -type quaternary intermetalliccitations
- 2022Tunable Electrical Properties of Ti-B-N Thin Films Sputter-Deposited by the Reactive Gas Pulsing Process
- 2022Ballistic and thermalized regimes to tune structure and conducting properties of W-Mo thin filmscitations
- 2022Revisiting neutron studies of reentrant spin glasses: the role of small-angle scatteringcitations
- 2022Improvement of textured AlCu with Ta underlayer on LiNbO3 substrate
- 2022Collective effects in ionic liquid [emim][Tf2N] and ionic paramagnetic nitrate solutions without long-range structuringcitations
- 2021Microstructured ZnO-ZnS composite for earth-abundant photovoltaics: Elaboration, surface analysis and enhanced optical performances
- 2021Controlled grain-size thermochromic VO2 coatings by the fast oxidation of sputtered vanadium or vanadium oxide films deposited at glancing angles
- 2020Pt–Ti Alloy Coatings Deposited by DC Magnetron Sputtering: A Potential Current Collector at High Temperaturecitations
- 2020A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
- 2020Influence of thickness and sputtering pressure on electrical resistivity and elastic wave propagation in oriented columnar tungsten thin filmscitations
- 2020Bismuth for Controlled Assembly/Disassembly of Transition-Metal Oxo Clusters, Defining Reaction Pathways in Inorganic Synthesis and Nature.citations
- 2019Nanocomposite thin films based on Au-Ag nanoparticles embedded in a CuO matrix for localized surface plasmon resonance sensingcitations
- 2019Electrical resistivity and elastic wave propagation anisotropy in glancing angle deposited tungsten and gold thin films
- 2019High performance piezoresistive response of nanostructured ZnO/Ag thin films for pressure sensing applicationscitations
- 2019High performance piezoresistive response of nanostructured ZnO/Ag thin films for pressure sensing applicationscitations
- 2019Conductive multilayer film based on composite materials made of conjugated polyelectrolytes and inorganic particles
- 2018Recommended flax fibre density values for composite property predictionscitations
- 2018Exploiting the dodecane and ozone sensing capabilities ofnanostructured tungsten oxide films
- 2018When and where do feed-forward neural networks learn localist representations?
- 2018W-Cu sputtered thin films grown at oblique angles from two sources: Pressure and shielding effectscitations
- 2018Optimization of nanocomposite Au/TiO2 thin films towards LSPR optical-sensingcitations
- 2018Anisotropic conductivity enhancement in inclined W-Cu columnar filmscitations
- 2018Nano-sculptured Janus-like TiAg thin films obliquely deposited by GLAD co-sputtering for temperature sensingcitations
- 2018Tuning electrical resistivity anisotropy of ZnO thin films for resistive sensor applicationscitations
- 2018Tuning electrical resistivity anisotropy of ZnO thin films for resistive sensor applications
- 2017In situ electrical resistivity measurements of vanadium thin films performed in vacuum during different annealing cycles
- 2017Influence of the sputtering pressure on the morphological features and electrical resistivity anisotropy of nanostructured titanium filmscitations
- 2017W-Cu sputtered thin films grown at oblique angles from two sources: Pressure and shielding effects
- 2017Correlations between structure, composition and electrical properties of tungsten/tungsten oxide periodic multilayers sputter deposited by gas pulsingcitations
- 2017Correlation between structure and electrical resistivity of W-Cu thin films prepared by GLAD co-sputteringcitations
- 2016Controlled thermal oxidation of nano structured vanadium thin films
- 2016Temperature dependence of electrical resistivity in oxidized vanadium films grown by the GLAD techniquecitations
- 2015Study of the electrical behavior of nanostructured Ti-Ag thin films prepared by Glancing Angle Deposition
- 2015Improvement of ozone detection with WO3 oriented films
- 2015Structural, electrical and magnetic characterization of in-situ crystallized ZnO:Co thin films synthesized by reactive magnetron sputteringcitations
- 2015Structural, electrical and magnetic characterization of in-situ crystallized ZnO:Co thin films synthesized by reactive magnetron sputtering
- 2014Electrochemical behaviour of nanocomposite Agx:TiN thin filmsfor dry biopotential electrodescitations
- 2014Electrical characterizationofAg:TiNthin films producedbyglancing angle depositioncitations
- 2014Flash annealing influence on structural and electrical properties of TiO2/TiO/Ti periodic multilayerscitations
- 2014Structural and electrical properties in tungsten/tungsten oxide multilayerscitations
- 2014Process monitoring during AlNxOy deposition by reactive magnetron sputtering and correlation with the film's propertiescitations
- 2014Electrochemical behaviour of nanocomposite Agx:TiN thin films for dry biopotential electrodescitations
- 2013TiAgx thin films for lower limb prosthesis pressure sensors: Effect of composition and structural changes on the electrical and thermal response of the filmscitations
- 2013Metal-to-Dielectric transition induced by annealing of oriented titanium thin films
- 2013Tuneable properties of aluminium oxynitride thin films
- 2013Reactive Gas Pulsing Process for Oxynitride Thin Films
- 2013Growth characteristics and properties of nanocomposite Ag-doped TiN thin films produced by glancing angle deposition
- 2013The interdependence of structural and electrical properties in TiO2/TiO/Ti periodic multilayerscitations
- 2013Anisotropic electrical resistivity during annealing of oriented columnar titanium filmscitations
- 2013Metal-to-dielectric transition induced by annealing of oriented titanium thin filmscitations
- 2013Cation size effect on the thermochromic properties of rare earth cobaltites RECoO3 (RE: La, Nd, Sm)citations
- 2013Influence of the degree of retting of flax fibers on the tensile properties of single fibers and short fiber/polypropylene compositescitations
- 2013Nanocomposite Ag:TiN thin films for dry biopotential electrodescitations
- 2013Interdependence of structural and electrical properties in tantalum/tantalum oxide multilayerscitations
- 2013Correlation between structural and optical properties of WO3 thin films sputter deposited by glancing angle depositioncitations
- 2012Infiltration of demineralized dentin with silica and hydroxyapatite nanoparticles.citations
- 2012Analysis of multifunctional titanium oxycarbide films as a function of oxygen additioncitations
- 2012Structural analysis of W3O/WO3 and TiO/TiO2 periodic multilayer thin films sputter deposited by the reactive gas pulsing processcitations
- 2012Electrical and optical properties of AlNxOy thin films deposited by reactive DC magnetron sputtering
- 2012Optical emission spectroscopy study of a DC magnetron discharge in Ar/(O2-N2)
- 2011A theoretical model for the electrical properties of chromium thin films sputter deposited at oblique incidencecitations
- 2010Effect of various parameters on the conductivity of free standing electrosynthesized polypyrrole films
- 2009Physical and Mechanical Properties of CrAlN and CrSiN Ternary Systems for Wood Machining Applicationscitations
- 2008Glancing angle deposition to control microstructure and roughness of chromium thin films
- 2008The contribution of grain boundary barriers to the electrical conductivity of titanium oxide thin filmscitations
- 2008The contribution of grain boundary barriers to the electrical conductivity of titanium oxide thin filmscitations
- 2006Phase mixture in MOCVD and reactive sputtering TiOxNy thin films revealed and quantified by XPS factorial analysis.citations
- 2005Nanoindentation of chromium zigzag thin films sputter depositedcitations
- 2003Properties and electrochromic performances of titanium oxynitride thin films prepared by reactive sputtering
- 2003Water as reactive gas to prepare titanium oxynitride thin films by reactive sputtering
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article
Tuning electrical resistivity anisotropy of ZnO thin films for resistive sensor applications
Abstract
This work reports on the preparation and characterization of Zinc Oxide (ZnO) thin films, exploring their anisotropic electrical resistivity behaviour evolution as a function of the different preparation conditions. Results show that by increasing the oxygen content in the work gas flow, the electrical resistivity increases from about 2.4 x 10(-2) Omega.cm (common in fairly conductive-like materials) to values in order of M Omega.cm, which is typical of materials that vary from semiconducting to roughly insulating type. Regarding the thin films structural behaviour, a relatively clear evolution of the preferential growth becomes clear when preparing the films within the three different regimes. The X-ray diffraction (XRD) patterns revealed the development of a polycrystalline hexagonal-like structure, confirmed by the presence of dominant and very intense ZnO (002) and ZnO (101) diffraction peaks. A change in preferential growth was noticed with the change in the preparation conditions.By in-air annealing the samples from room temperature (RT) up to 200 degrees C and cooling down to RT again, the differences between the resistivity values along the xx and yy directions become significant, a clear sign of the anisotropic nature of the films. The anisotropy obtained during the annealing cycles of the films increased from 0.98 to 1.10 and, consequently, the Temperature Coefficient of Resistance, TCR, increased in both xx and yy directions, from TCRxx (and yy) similar to 9.0x10(-4) to TCRxx = 6.82 x 10(-3) and TCRyy = 5.97 x 10(-3) degrees C-1. Important also to note is that the increase of the grain size of the films showed to have a significant effect in the effective anisotropy, revealing to be a major factor to take into account. ; This work was supported by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2013 and project PTDC/EEI-SII/5582/2014 and by the Region of Franche-Comte, the French RENATECH network and performed in cooperation with the ...