• Lindig, S.
• Balden, M.
• Rasiński, Marcin
• Płociński, Tomasz
• Sauter, P. A.
• Jong, S.
• Adelhelm, C.

Abstract

Tungsten-containing amorphous carbon films were produced by dual magnetron sputter deposition. The formation of carbide phases after heat treatment in inert gas at temperatures up to 2800 K was investigated by X-ray diffraction for tungsten concentrations below 25 at.%. After deposition, each film consists of an amorphous carbon matrix with atomically dispersed W inclusions. Annealing up to 2800 K leads to a formation of carbide phases and to nano clustering. Three tungsten carbide phases were observed (WC, W2C, and WC 1 - x), mostly as mixtures of two phases. The phase combination depends on annealing temperature and W concentration. Additionally, nano diffraction was performed in a scanning transmission electron microscope, to determine the phase of single crystallites at scales, where X-ray diffraction fails. © 2011 Elsevier B.V. All rights reserved.

Topics

• Deposition
• amorphous
• Carbon
• inclusion
• phase
• x-ray diffraction
• carbide
• annealing
• tungsten
• clustering