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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Bodea, Marius
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2012Ion beam irradiation of cuprate high-temperature superconductors: Systematic modification of the electrical properties and fabrication of nanopatternscitations
- 2012Non-ohmic electrical transport properties above the critical temperature in optimally and underdoped superconducting YBa2Cu3O6+xcitations
- 2011Modeling of Droplet Dynamic and Thermal Behavior during Gas Atomization Process
- 2010Optically induced changes and long-term relaxations of resistivity and critical temperature in He+ irradiated YBa2Cu3Oxcitations
- 2010Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin filmscitations
- 2010Modification and nano-patterning of high-Tc superconducting thin films by masked ion beam irradiationcitations
- 2009Masked ion beam irradiation of high-temperature superconductors: patterning of nano-size regions with high point-defect densitycitations
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article
Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films
Abstract
Surface planarization and masked ion-beam structuring (MIBS) of high-<i>T</i><sub>c</sub> superconducting (HTS) YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> (YBCO) thin films grown by pulsed-laser deposition (PLD) method is reported. Chemical-mechanical polishing, plasma etching, and oxygen annealing of YBCO films strongly reduce the particulate density (~ 10<sup>-2</sup> x) and surface roughness (~ 10<sup>-1</sup> x) of as-grown PLD layers. The resistivity, critical temperature T-c approximate to 90 K and critical current density <i>J</i><sub>c</sub> (77 K)> 1 MA/cm<sup>2</sup> of films are not deteriorated by the planarization procedure. The YBCO films are modified and patterned by irradiation with He ions of 75 key energy. Superconducting tracks patterned by MIBS without removal of HIS material and, for comparison, by wet-chemical etching show same <i>T</i><sub>c</sub> and <i>J</i><sub>c</sub>(<i>T</i>) values. Different micro- and nano-patterns are produced in parallel on planarized films. The size of irradiated pattern depends on the mask employed for beam shaping and features smaller than 70 nm are achieved.