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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Rebholz, C.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2010A study of the nanostructure and hardness of electron beam evaporated TiAlBN coatingscitations
- 2010Mechanical and high pressure tribological properties of nanocrystalline Ti(N,C) and amorphous C:H nanocomposite coatingscitations
- 2010Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatingscitations
- 2009Simulation and experimental analysis of substrate overmolding
- 2007Hard and superhard TiAlBN coatings deposited by twin electron-beam evaporationcitations
- 2006Correlation of elastic modulus, hardness and density for sputtered TiAlBN thin filmscitations
- 2005Applied encapsulation methods in mechatronics
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article
Correlation of elastic modulus, hardness and density for sputtered TiAlBN thin films
Abstract
This paper describes the correlation between the elastic modulus, hardness and density of mainly X-ray amorphous TiAl x B y N z (0.29 ≤ x ≤ 1.32; 1.15 ≤ y ≤ 2.07; 0.37 ≤ z ≤ 2.19) films, deposited by simultaneous reactive magnetron sputtering from TiAl and TiB 2 targets onto AISI 316 stainless steel and Si(100) substrates in Ar/N 2 mixtures at 150 °C. The elastic modulus, hardness and density were found to depend on chemical composition and the phases present, and an approximately linear correlation between elastic modulus and hardness could be established. The elastic modulus and hardness were also found to be a function of film density, except in films containing significant amounts of BN.