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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cojocaru, Costel Sorin
École Polytechnique
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (23/23 displayed)
- 2019Anisotropy of Assemblies of Densely Packed Co-Alloy Nanoparticles Embedded in Carbon Nanotubescitations
- 2016Optical Scale Polarimetric Device for Nanotube Forest Measurement: An Opportunity to Anticipate Bistatic Polarimetric SAR Images of Tree Trunk Forests at P-Bandcitations
- 2016Optical Scale Polarimetric Device for Nanotube Forest Measurement: An Opportunity to Anticipate Bistatic Polarimetric SAR Images of Tree Trunk Forests at P-Bandcitations
- 2014Nanosecond-laser-induced graphitization and amorphization of thin nano-crystalline graphite films
- 2012Different mechanisms of graphene wall nucleation on Fe and Ni particles
- 2012Current Saturation in Field Emission from H-Passivated Si Nanowirescitations
- 2011Vertically oriented nickel nanorod/carbon nanofiber core/shell structures synthesized by plasma-enhanced chemical vapor depositioncitations
- 2011Iron catalysts for the growth of carbon nanofibers: Fe, Fe3C or both?citations
- 2011Iron catalysts for the growth of carbon nanofibers : Fe, Fe_{3}C$ or both?
- 2011High-quality Single-walled carbon nanotubes synthesis by hot filament CVD on Ru nanoparticule catalystcitations
- 2011Synthesis of few-layered graphene by ion implantation of carbon in nickel thin filmscitations
- 2011Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition
- 2010Iron catalyst for the growth of carbon nanofibers: Fe, Fe3C or both?citations
- 2010Nickel catalyst faceting in plasma-enhanced direct current chemical vapor deposition of carbon nanofibers
- 2009Conductance of disordered semiconducting nanowires and carbon nanotubes: a chain of quantum dotscitations
- 2008Growth of vertically aligned arrays of carbon nanotubes for high field emissioncitations
- 2008Localized CVD growth of oriented and individual carbon nanotubes from nanoscaled dots prepared by lithographic sequencescitations
- 2008Density control of electrodeposited Ni nanoparticles/nanowires inside porous anodic alumina templates by an exponential anodization voltage decreasecitations
- 2007Aligned carbon nanotubes catalytically grown on iron-based nanoparticles obtained by laser-induced CVDcitations
- 2006On the role of activation mode in the plasma- and hot filaments-enhanced catalytic chemical vapour deposition of vertically aligned carbon nanotubescitations
- 2006Synthesis of multi-walled carbon nanotubes by combining hot-wire and dc plasma-enhanced chemical vapor depositioncitations
- 2006Study of electron field emission from arrays of multi-walled carbon nanotubes synthesized by hot-wire dc plasma-enhanced chemical vapor depositioncitations
- 2003Ni and Ni/Pt filling inside multiwalled carbon nanotubescitations
Places of action
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article
Synthesis of multi-walled carbon nanotubes by combining hot-wire and dc plasma-enhanced chemical vapor deposition
Abstract
International audience ; Multi-walled carbon nanotubes (MWCNTs) have been grown on 7 nm Ni-coated substrates consisting of crystalline silicon covered with a thin layer (10 nm) of TiN, by combining hot-wire chemical vapor deposition (HWCVD) and direct current plasma-enhanced chemical vapor deposition (dc PECVD), at 620 °C. Acetylene (C2H2) gas is used as the carbon source and ammonia (NH3) and hydrogen (H2) are used either for dilution or etching. The carbon nanotubes range from 20 to 100 nm in diameter and 0.3 to 5 μm in length, depending on growth conditions: plasma intensity, filament current, pressure, C2H2, NH3, H2 flow rates, C2H2/NH3 and C2H2/H2 mass flow ratios. By combining the HWCVD and the dc PECVD processes, uniform growth of oriented MWCNTs was obtained, whereas by using only the HWCVD process, tangled MWCNTs were obtained. By patterning the nickel catalyst, with the use of the HW dc PECVD process, uniform arrays of nanotubes have been grown as well as single free-standing aligned nanotubes, depending on the catalyst patterning (optical lithography or electron-beam lithography). In the latter case, electron field emission from the MWCNTs was obtained with a maximum emission current density of 0.6 A/cm2 for a field of 16 V/μm.