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Chrzanowska-Giżyńska, Justyna
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article
Influence of overstoichiometric boron and titanium addition on the properties of RF magnetron sputtered tungsten borides
Abstract
In this work, (W,Ti)B2 films with different stoichiometric ratio Ti/W deposited on silicon and 304 stainless steelby radio frequency magnetron sputtering are presented. The coatings were deposited from plasma spark sinteredtargets obtained from the mixture of pure boron, tungsten and titanium powders. It is shown that during plasmaspark sintering process using overstoichiometric boron and a low content of titanium change the WB2 to WB4phase with almost no secondary phases. Subsequently, the impact of titanium content on the films properties isinvestigated systematically, including the chemical and phase composition, crystalline structure, surface andcross-section morphology. Simultaneously, nano-indentation test and ball-on-disk tribometery are performed toanalyse the hardness and tribological properties of the films. It is shown that deposited films with titaniumcontent of 3.6 and 5.5 at.% are formed in the zone T of the Thornton's Structural Zone Model. In opposite to α-WB2 magnetron sputtered coatings they are more flexible and hard nanocomposite coatings. The results showthat the addition of titanium is apparently changing the film structure from nanocrystalline columnar toamorphous, very dense and compact structure with the addition of TiB2 phase. That films are simultaneouslyhard (H > 37.5 GPa), have high hardness to effective Young's modulus ratio values (H/E⁎ > 0.1) and elasticrecovery (We > 60%) appropriate for tough and resistant to cracking materials. The presented (W,Ti)B2 filmsexhibit also tribological and corrosion properties better than unalloyed coatings.