| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Pireaux, Jean Jacques
University of Namur
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2023Plasma Treatment of Polystyrene Films—Effect on Wettability and Surface Interactions with Au Nanoparticlescitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO2 nanocatalysts for toluene degradationcitations
- 2022X-ray Photoelectron Spectroscopy (XPS) Analysis of Ultrafine Au Nanoparticles Supported over Reactively Sputtered TiO 2 Filmscitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO 2 nanocatalysts for toluene degradationcitations
- 2021Compositional, structural, morphological, and optical properties of ZnO thin films prepared by PECVD techniquecitations
- 2020Using ammonia for reactive magnetron sputtering, a possible alternative to HiPIMS?citations
- 2020Formable chromium nitride coatings for proton exchange membrane fuel cell stainless steel bipolar platescitations
- 2019Carbon-based lanthanum nickelate material La 2−x−y Nd x Pr y NiO 4+δ (x = 0, 0.3, and 0.5; y = 0 and 0.2) as a bifunctional electrocatalyst for oxygen reduction in alkaline mediacitations
- 2019Defective Pt–Ni/graphene nanomaterials by simultaneous or sequential treatments of organometallic precursors by low-pressure oxygen plasmacitations
- 2018Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitridecitations
- 2015Interface and Composition Analysis on Perovskite Solar Cellscitations
- 2015Air-stable, non-volatile resistive memory based on hybrid organic/inorganic nanocompositescitations
Places of action
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article
Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitride
Abstract
Among the different techniques of reactive sputtering, the bipolar and high power impulse magnetron sputtering are growing in interest for the thin films research community. However, the combination of both processes in presence of a reactive atmosphere is extremely complex and the role of the sputtering parameters are key points to control the deposited material properties. In this study, we have investigated the effect of the duty cycle and the pulse frequency on the reactive bipolar sputtering efficiency of chromium in presence of nitrogen. The study has been performed on a wide range of parameters: from 12.5 to 87.5% for the duty cycle, and from 62.5 to 5000 Hz for the frequency. In situ measurements of the magnetron discharge characteristics have been performed (excitation temperature, peak target current and voltage, energy influx at substrate position) in addition to ex situ characterizations of the deposited thin films (structure, microstructure, density, composition, optical and mechanical properties). It appears that the modulation of the duty cycle allows a better control of the mechanical properties due to higher ionization level at the target, while the frequency is better adapted to tune the optical properties that are attributed to a change of texturation and density of the deposited film (confirmed by simulation). All films present a similar microstructure due to the absence of bias applied to the substrate during the deposition process, which leads to a similar energy per atom of deposited species.