| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Haye, Emile
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (28/28 displayed)
- 2024Revealing wear mechanisms of coated shafts in low-speed journal bearings immersed in liquid Lead-Bismuth Eutectic (LBE)
- 2024Porous microstructures of thin films sputtered by magnetron sputtering onto carbon nanomaterial surface
- 2024Changes in chemical composition of TixAl1−xN coatings immersed in oxygen-saturated Lead–Bismuth Eutectic at low and moderate temperatures (250 °C ≤ T ≤ 410 °C)citations
- 2023Vein pattern vs. columnar fracture shape in Cu-Zr thin film metallic glassescitations
- 2023Tuning the physico-chemical properties of SnSe films by pulse electrodepositioncitations
- 2023Thermo-kinetic approach to the crystallization mechanism of thermochromic SmNiO3 thin films: An in situ study in air-annealingcitations
- 2023Thermo-kinetic approach to the crystallization mechanism of thermochromic SmNiO 3 thin films:An in situ study in air-annealingcitations
- 2023Vein pattern vs. columnar fracture shape in Cu-Zr thin film metallic glasses:Driving force and mechanismcitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO2 nanocatalysts for toluene degradationcitations
- 2022Theoretical and experimental approaches for the determination of functional properties of MgSnN 2 thin filmscitations
- 2022A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatingscitations
- 2022A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatingscitations
- 2022Theoretical and experimental approaches for the determination of functional properties of MgSnN2 thin filmscitations
- 2022Composite alginate membranes with dispersed MQFP hard magnet network as a new concept for highly efficient pervaporative dehydration of ethanol/water mixturecitations
- 2022Investigation of the Antibacterial Properties of Silver-Doped Amorphous Carbon Coatings Produced by Low Pressure Magnetron Assisted Acetylene Dischargescitations
- 2022Influence of oxygen co-implantation on germanium out-diffusion and nanoclustering in SiO2/Si filmscitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO 2 nanocatalysts for toluene degradationcitations
- 2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental depositioncitations
- 2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental depositioncitations
- 2020Using ammonia for reactive magnetron sputtering, a possible alternative to HiPIMS?citations
- 2020Formable chromium nitride coatings for proton exchange membrane fuel cell stainless steel bipolar platescitations
- 2019Probing the growth window of LaVO 3 perovskites thin films elaborated using magnetron co-sputteringcitations
- 2019Defective Pt–Ni/graphene nanomaterials by simultaneous or sequential treatments of organometallic precursors by low-pressure oxygen plasmacitations
- 2018Chemical environment and functional properties of highly crystalline ZnSnN2 thin films deposited by reactive sputtering at room temperaturecitations
- 2018Nitrogen redistribution in annealed LaFeO x N y thin films investigated by FTIR spectroscopy and EELS mappingcitations
- 2018Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitridecitations
- 2017LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural propertiescitations
- 2016Properties of rare-earth orthoferrites perovskite driven by steric hindrancecitations
Places of action
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article
Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitride
Abstract
Among the different techniques of reactive sputtering, the bipolar and high power impulse magnetron sputtering are growing in interest for the thin films research community. However, the combination of both processes in presence of a reactive atmosphere is extremely complex and the role of the sputtering parameters are key points to control the deposited material properties. In this study, we have investigated the effect of the duty cycle and the pulse frequency on the reactive bipolar sputtering efficiency of chromium in presence of nitrogen. The study has been performed on a wide range of parameters: from 12.5 to 87.5% for the duty cycle, and from 62.5 to 5000 Hz for the frequency. In situ measurements of the magnetron discharge characteristics have been performed (excitation temperature, peak target current and voltage, energy influx at substrate position) in addition to ex situ characterizations of the deposited thin films (structure, microstructure, density, composition, optical and mechanical properties). It appears that the modulation of the duty cycle allows a better control of the mechanical properties due to higher ionization level at the target, while the frequency is better adapted to tune the optical properties that are attributed to a change of texturation and density of the deposited film (confirmed by simulation). All films present a similar microstructure due to the absence of bias applied to the substrate during the deposition process, which leads to a similar energy per atom of deposited species.