| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mazur, Michal
Charles University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2023Exfoliating layered zeolite MFI into unilamellar nanosheets in solution as precursors for the synthesis of hierarchical nanocomposites and oriented filmscitations
- 2022Direct dehydrogenation of propane over Pd nanoparticles encapsulated within IPC zeolites with tunable pore sizes ; Přímá dewhydrogenace propanu na Pd nanočásticích zapouzdřených uvnitř IPC zeolitu s volitelnou velikostí pórůcitations
- 2021Controlled synthesis of large single crystals of metal-organic framework CPO-27-Ni prepared by a modulation approach : in situ single crystal X-ray diffraction studiescitations
- 2021Controlled synthesis of large single crystals of metal-organic framework CPO-27-Ni prepared by a modulation approach: in situ single crystal X-ray diffraction studiescitations
- 2020Effect of physical activation/surface functional groups on wettability and electrochemical performance of carbon/activated carbon aerogels based electrode materials for electrochemical capacitorscitations
- 2020Core–Shell Metal Zeolite Composite Catalysts for In Situ Processing of Fischer–Tropsch Hydrocarbons to Gasoline Type Fuelscitations
- 2019Effect of nitrogen doping on the electrochemical performance of resorcinol-formaldehyde based carbon aerogels as electrode material for supercapacitor applicationscitations
- 2019Vapour-phase-transport rearrangement technique for the synthesis of new zeolitescitations
- 2018Zeolite framework functionalisation by tuneable incorporation of various metals into the IPC-2 zeolitecitations
- 2017Modification of various properties of HfO2 thin films obtained by changing magnetron sputtering conditionscitations
- 2016Investigation of various properties of HfO2-TiO2 thin film composites deposited by multi-magnetron sputtering systemcitations
- 2015Investigation of structural, optical and micro-mechanical properties of (NdyTi1-y)O-x thin films deposited by magnetron sputteringcitations
Places of action
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article
Modification of various properties of HfO2 thin films obtained by changing magnetron sputtering conditions
Abstract
In this work properties of hafnium dioxide (HfO<sub>2</sub>) thin films deposited by magnetron sputtering with different powers (i.e. 200 W, 400 W and 600 W) were described. Based on microstructure measurements obtained by X-ray diffraction, Raman scattering and transmission electron microscopy method it was observed that there is a significant influence of the sputtering power on investigated properties of HfO<sub style="">2</sub> thin films. Increase of the sputtering power caused, e.g. an increase of average crystallite size and surface roughness. Microstructure of thin films deposited with lower power was composed from a large number of voids that resulted in significant changes of their optical and mechanical properties. Results of optical studies showed that all deposited thin films were well transparent in a visible light range. Refractive index increased gradually with an increase of deposition power from 1.86 (200 W) to 2.09 (600 W). Performed investigations of mechanical properties revealed that hardness and Young’s elastic modulus of HfO<sub>2</sub> thin films increased with an increase of the sputtering power.