| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Stamate, Eugen
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2024Oxygen-defective electrostrictors for soft electromechanicscitations
- 2024Oxygen-defective electrostrictors for soft electromechanicscitations
- 2022Silver-substituted (Ag1-xCux)2ZnSnS4 solar cells from aprotic molecular inkscitations
- 2022Silver-substituted (Ag1-xCux)2ZnSnS4 solar cells from aprotic molecular inkscitations
- 2022Development of an SFMM/CGO composite electrode with stable electrochemical performance at different oxygen partial pressurescitations
- 2022Development of an SFMM/CGO composite electrode with stable electrochemical performance at different oxygen partial pressurescitations
- 2022Development of an SFMM/CGO composite electrode with stable electrochemical performance at different oxygen partial pressurescitations
- 2020Low-temperature preparation and investigation of electrochemical properties of SFM/CGO composite electrodecitations
- 2020Low-temperature preparation and investigation of electrochemical properties of SFM/CGO composite electrodecitations
- 2020Energy band alignment at the heterointerface between CdS and Ag-alloyed CZTScitations
- 2020Energy band alignment at the heterointerface between CdS and Ag-alloyed CZTScitations
- 2020Energy band alignment at the heterointerface between CdS and Ag-alloyed CZTScitations
- 2020Monolithic thin-film chalcogenide–silicon tandem solar cells enabled by a diffusion barriercitations
- 2020Persistent Double-Layer Formation in Kesterite Solar Cells: A Critical Reviewcitations
- 2020Persistent Double-Layer Formation in Kesterite Solar Cells: A Critical Reviewcitations
- 2019Thin films of CZTS and CZTO for solar cells produced by pulsed laser deposition
- 2019Thin films of CZTS and CZTO for solar cells produced by pulsed laser deposition
- 2015Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin filmscitations
- 2014Status and challenges in electrical diagnostics of processing plasmascitations
- 2013A modified anode/electrolyte structure for a solid oxide electrochemical cell and a method for making said structure
- 2011Metallic and Insulating Interfaces of Amorphous SrTiO3-Based Oxide Heterostructurescitations
Places of action
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article
Status and challenges in electrical diagnostics of processing plasmas
Abstract
Dry processing based on reactive plasmas was the main driven force for micro- and recently nano-electronic industry. Once with the increasing in plasma complexity new diagnostics methods have been developed to ensure a proper process control during etching, thin film deposition, ion implantation or other steps in device fabrication. This work reviews some of the unconventional methods developed in the last two decays to measure the parameters of reactive plasmas including, the test function method, thermal probes, and plasma-sheath-lens probes. The negative ion detection and surface contamination in plasmas with a high degree of contamination are also addressed. (C) 2014 Elsevier B.V. All rights reserved.