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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Dejneka, A.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (34/34 displayed)
- 2023Small-polaron transport in perovskite nickelatescitations
- 2022Small-polaron conductivity in perovskite ferroelectric BaTiO₃ films
- 2022Strain enhancement due to oxygen vacancies in perovskite oxide filmscitations
- 2021Large negative photoresistivity in amorphous NdNiO₃ film
- 2021Epitaxial growth of perovskite oxide films facilitated by oxygen vacancies
- 2021The electronic properties of SrTiO3‑δ with oxygen vacancies or substitutions
- 2020Structure assembly regularities in vapour-deposited gold–fullerene mixture filmscitations
- 2020In situ anion-doped epitaxial strontium titanate filmscitations
- 2020Multiple optical impacts of anion doping in epitaxial barium titanate films
- 2019Quantum plasmon excitations in gold-fullerene mixture filmscitations
- 2019Perovskite ferroelectric tuned by thermal strain
- 2018Quantum plasmon and Rashba-like spin splitting in self-assembled Co <sub>x</sub> C<sub>60</sub> composites with enhanced Co content (x > 15)citations
- 2017Optical transitions and electronic interactions in self-assembled cobalt-fullerene mixture filmscitations
- 2017Localization phenomena in disordered tantalum filmscitations
- 2017Optical NIR-VIS-VUV constants of advanced substrates for thin-film devicescitations
- 2016Features of the low-frequency polarization response in the region of the ferroelectric phase transition in multiferroic TbMnO.sub.3./sub.citations
- 2015Deficiency of standard effective-medium approximation for ellipsometry of layers of nanoparticlescitations
- 2014The transition from dynamics to statics in the electron-spin-resonance spectra of impurity Mn.sup.2+./sup. ions in strontium titanatecitations
- 2014Using the methods of radiospectroscopy (EPR, NMR) to study the nature of the defect structure of solid solutions based on lead zirconate titanate (PZT)citations
- 2014Synthesis, structure and properties of heavily Mn-doped perovskite-type SrTiO.sub.3./sub. nanoparticlescitations
- 2013EPR study of charge compensation of chromium centers in the strontium titanate crystalcitations
- 2013Optical properties of epitaxial relaxor ferroelectric PbSc.sub.0.5./sub.Nb.sub.0.5./sub.O.sub.3./sub. filmscitations
- 2012Raman spectroscopy of dip-coated and spin-coated sol-gel TiO.sub.2./sub. thin films on different types of glass substratescitations
- 2012Ellipsometry applied to phase transitions and relaxation phenomena in Ni.sub.2./sub.MnGa ferromagnetic shape memory alloycitations
- 2012Size effect on the structure and optical properties in nanocrystalline SrTiO.sub.3./sub.citations
- 2011Imprint behavior of piezoelectric PZT thin films deposited onto Cu-coated polymer substrates
- 2011Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputteringcitations
- 2011An optical and dielectric spectroscopy study of Er.sup.3+./sup.-doped KTaO.sub.3./sub.citations
- 2010Piezoelectric PZT Thin Films on Flexible Copper-coated Polymer Filmscitations
- 2010Soft chemistry preparation methods and properties of strontiumtitanate nanoparticlescitations
- 2010Tensile strain induced changes in the optical spectra of SrTiO.sub.3./sub. epitaxial thin filmscitations
- 2010Spectroscopic ellipsometry of SrTiO.sub.3./sub. crystals applied to antiferrodistortive surface phase transitioncitations
- 2008Deposition of PZT thin films on copper-coated polymer foils
- 2008Dielectric properties of Mn doped SrTiO3citations
Places of action
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article
Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering
Abstract
S.S241-S244 ; In this work, Pb(Zr,Ti)O3 (PZT) thin films were deposited onto flexible Cu-coated Kapton® substrates by means of reactive magnetron sputtering for the first time. Different power supplies were selected for each of the 200 mm targets to adjust film composition and substrate ion bombardment. High-power pulse sputtering has been employed for the Zr-target to enhance for formation of nanocrystals, pulsed DC sputtering for the Titarget to provide a high enough sputter yield, and RF-sputtering for the Pb-target to prevent droplet formation. The deposited films had a lead-enriched layer at the surface and their film composition was in rhombohedral range near the morphotropic phase boundary of the PZT phase diagram. XRD revealed a nanocrystallite mixture of lead, zirconium and titanium oxides in the as-deposited films which can be transferred into perovskite Pb(Zr,Ti)O3 by rapid temperature annealing. Observed piezoelectric properties demonstrate that rapid-temperature-annealed films are promising for application in flexible piezoelectric sensors, actuators and power generators. ; 205 ; Supplement 2