693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Franssila, Sami
Aalto University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2022Microfabrication atomic layer deposited Pt NPs/TiN thin film on silicon as a nanostructure signal Transducer: Electrochemical characterization toward neurotransmitter sensingcitations
- 2021Fabrication of elastic, conductive, wear-resistant superhydrophobic composite materialcitations
- 2020Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testcitations
- 2019Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carboncitations
- 2018Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testcitations
- 2018Platinum recovery from Industrial Process Solutions by Electrodepo-sition-Redox Replacement
- 2016Cellulose nanofibril film as a piezoelectric sensor materialcitations
- 2016Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etchingcitations
- 2016Novel nanostructure replication process for robust superhydrophobic surfacescitations
- 2016Robust hybrid elastomer/metal-oxide superhydrophobic surfacescitations
- 2015Fracture properties of atomic layer deposited aluminum oxide free-standing membranescitations
- 2013Laser direct writing of thick hybrid polymer microstructurescitations
- 2010Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensorscitations
- 2009Carbon nanotube thin film transistors based on aerosol methodscitations
- 2007Glass microfabricated nebulizer chip for mass spectrometrycitations
- 2006Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchipcitations
Places of action
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article
Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Abstract
We report the use of atomic layer deposition (ALD) to produce the gas-sensitive tin dioxide film in a microhotplate gas sensor. The performance of the device was demonstrated using ethanol, acetone and acrylonitrile as model analytes. Fast response times and low drift rates of the output signal were measured, indicating a structurally stable tin dioxide film and reflecting the capabilities of ALD in gas sensor applications. Fabrication of the microhotplate using tungsten metallization and plasma deposited silicon dioxide dielectrics is also detailed.