• Shur, Vladimir Ya
• Shur, Vladimir Ya.
• Krylov, Slava
• Shacham, Yosi
• Ushakov, Andrei
• Shacham-Diamand, Yosi
• Kholkin, Andrei
• Lubomirsky, Igor
• Shklovsky, Jenny
• Mishuk, Eran
• Kholkin, Andrei L.

Abstract

<p>We studied the stability of the mechanical properties and the fatigue endurance of Gd-doped ceria (CGO), which is a promising electromechanically active material for microelectromechanical systems (MEMS). Specifically, the fracture strength and long-term operation of plate-type circular (2 mm diameter) thermal actuators made of ≈1.15 μm thick Ce_0.95Gd_0.05O_1.975 (CGO5) were investigated. Excitation voltage of 10 V at the frequency range between 1 and 2.1 MHz induces Joule heating effect that can generate an in-plane strain of ≈0.1 %. The operation temperature ranged from 25 °C to 80 °C and the temperature shift, caused by the AC heating, was about 80 K at 10 V. Critical fracture was found to occur at out-of-plane displacements between ∼35 and ∼42 μm, which corresponds to the average bending stress of ∼44 MPa at the center of the plate. During long-term operation, the actuators exhibit gradual decrease in the response, probably due to contact degradation. However, structural damage or mechanical fatigue was not found even after 10⁷ cycles at a stress level of ∼30 % of the critical fracture strength.</p>

Topics

• impedance spectroscopy
• strength
• fatigue