| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Uttamchandani, Deepak
University of Strathclyde
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 20223D-printing optical components for microscopy using a desktop 3D-printer
- 2020MEMS gas flow sensor based on thermally induced cantilever resonance frequency shiftcitations
- 2018Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrorscitations
- 2018Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducerscitations
- 2013The development of sensors for volatile nitro-containing compounds as models for explosives detectioncitations
- 2012Microelectrode sensor utilising nitro-sensitive polymers for application in explosives detectioncitations
- 2011Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantileverscitations
- 2009Simultaneous determination of the Young's modulus and Poisson's ratio in micro/nano materialscitations
Places of action
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article
Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers
Abstract
As microelectromechanical systems (MEMS) become more complex and is produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties <br/>of the commonly used MEMS materials. One of the most important properties for MEMS is the Young’s modulus. This work describes the direct comparison of two methods often used for measuring the Young’s <br/>modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever <br/>geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.