| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Krijnen, Gijs J. M.
University of Twente
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2021Model Code of Anisotropic Electrical Conduction in Layered 3D-Prints with Fused Deposition Modeling
- 20203D-Printing of a Lemon Battery via Fused Deposition Modelling and Electrodepositioncitations
- 2007Biomimetic micromechanical adaptive flow-sensor arrayscitations
- 2007Cricket inspired flow-sensor arrayscitations
- 2006A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonatorscitations
- 2005Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substratescitations
- 2005Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications
- 2005Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal depositioncitations
- 2005Multifunctional tool for expanding afm-based applicationscitations
- 2005Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators
- 2004Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures
- 2001Platinum patterning by a modified lift-off technique and its application in a silicon load cell
- 2000Wet and dry etching techniques for the release of sub-micrometre perforated membranescitations
- 2000Characterization of platinum lift off technique
Places of action
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article
A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators
Abstract
A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl ammonium hydroxide (TMAH) of 25 wt.% solution is used as an etching solution for the AlN thin films. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films are deposited by RF reactive sputtering. Thin layers of chromium on either side of the AlN are used as top and bottom electrodes and also as a mask to etch the AlN and polysilicon layers. The fabricated suspended unimorph structures are tested for scattering parameters using a vector network analyzer. Results show resonant frequencies of devices above 1.7 GHz with an effective electromechanical coupling factor, $K^2_{ eff}1.7\%$