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Koch, F.
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Publications (7/7 displayed)
- 2016Solid-state processing of organic semiconductors.citations
- 2016Materials for DEMO and reactor applications-boundary conditions and new concepts
- 2013Recent progress in research on tungsten materials for nuclear fusion applications in Europecitations
- 2013Recent progress in research on tungsten materials for nuclear fusion applications in Europecitations
- 2011Influence of deposition temperature and bias voltage on the crystalline phase of Er₂O₃ thin films deposited by filtered cathodic arccitations
- 2009Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc depositioncitations
- 2009Monoclinic B-phase erbium sesquioxide (Er₂O₃) thin films by filtered cathodic arc depositioncitations
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article
Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition
Abstract
Er2O3 sesquioxide thin films in the uncommon, monoclinic phase were produced for the first time by filtered cathodic arc deposition on Eurofer steel substrates. This was achieved by applying a sample bias of -250 V and deposition temperatures ≤400 °C. X-ray diffraction texture analysis revealed a strong preferred orientation of the B-phase crystallites. Deposition at 600 °C without bias voltage resulted in thin films showing the regular cubic phase. A dense, columnar structure was found for both phases by scanning transmission electron microscopy. © 2009 Acta Materialia Inc.