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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Lekkala, Jukka
Tampere University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2022Transparent Microelectrode Arrays Fabricated by Ion Beam Assisted Deposition for Neuronal Cell In Vitro Recordings
- 2020Transparent microelectrode arrays fabricated by ion beam assisted deposition for neuronal cell in vitro recordingscitations
- 2020Materials and Orthopedic Applications for Bioresorbable Inductively Coupled Resonance Sensorscitations
- 2018Bioresorbable Conductive Wire with Minimal Metal Contentcitations
- 2017Designing, Manufacturing and Testing of a Piezoelectric Polymer Film In-Sole Sensor for Plantar Pressure Distribution Measurementscitations
- 2016Inductively coupled passive resonance sensor for monitoring biodegradable polymers in vitrocitations
- 2016Measurement of sensitivity distribution map of a ferroelectret polymer filmcitations
- 2016Mimetic Interfaces: Facial Surface EMG Dataset 2015 (Data and software)
- 2015Passive resonance sensor based method for monitoring particle suspensionscitations
- 2012Atomic layer deposited iridium oxide thin film as microelectrode coating in stem cell applicationscitations
- 2010pH electrode based on ALD deposited iridium oxidecitations
- 2001Piezo- and pyroelectricity of a polymer-foam space-charge electretcitations
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document
pH electrode based on ALD deposited iridium oxide
Abstract
We have made planar pH electrodes that use iridium oxide (IrOx) fabricated by atomic layer deposition (ALD) as the pH sensitive layer. As far as we know, ALD has not been reported earlier as the method of producing IrOx layer on pH electrodes. The structure built on glass substrate consists of 300 nm thick titanium electrodes coated with 110 nm IrOx layer. When measured against a commercial Ag/AgCl reference electrode, we were able to observe a linear and super-Nernstian pH response over the tested range from pH 4 to pH 10. The average sensitivity of three electrodes was −67 mV/pH at 22 °C. After 30 s stabilization time the total drift during the next 90 s remained mainly below 1 mV. The 90% response time was determined to be less than 3 s.