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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Jaeger, Jean-Claude De
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Publications (4/4 displayed)
- 2014Dispersion properties and low infrared optical losses in epitaxial AlN on sapphire substrate in the visible and infrared rangecitations
- 2014Theoretical and experimental investigation of Lamb waves characteristics in AlN/TiN and AlN/TiN/NCD composite membranescitations
- 2013Optical properties of aluminum nitride thin films grown by direct-current magnetron sputtering close to epitaxycitations
- 2009AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuatorscitations
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document
AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
Abstract
Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AlN films that is sandwiched between two metallic electrodes. The thicknesses of AlN and diamond layers are 1μm and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.