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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Pernod, Philippe
École Centrale de Lille
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (26/26 displayed)
- 2022Ultrafast manipulation of magnetic anisotropy in a uniaxial intermetallic heterostructure TbCo 2 /FeCocitations
- 2022Composite Multiferroic Terahertz Emitter: Polarization Control via an Electric Fieldcitations
- 2022A New Approach to Improve the Control of the Sensitive Layer of Surface Acoustic Wave Gas Sensors Using the Electropolymerizationcitations
- 2021Polarization control of THz emission using spin-reorientation transition in spintronic heterostructurecitations
- 2020E-field control of magnetization and susceptibility of AFE-based YIG/PLZST heterostructurecitations
- 2020Photoinduced spin dynamics in a uniaxial intermetallic heterostructure $$hbox {TbCo}_2/hbox {FeCo}$$citations
- 2020Experimental characterization of three-dimensional Graphene’s thermoacoustic response and its theoretical modellingcitations
- 2020Experimental characterization of three-dimensional Graphene’s thermoacoustic response and its theoretical modellingcitations
- 2020Ferromagnetism in the Ferromagnetic Yttrium Iron Garnet Film/Ferromagnetic Intermetallic Compound Heterostructurecitations
- 2019Thermoacoustic sound generation model in porous nanomaterials
- 2019Thermoacoustic sound generation model in porous nanomaterials
- 2019Resistivity of Manganite Thin Film Under Straincitations
- 2019[Invited] Thermoacoustic sound generation model in porous nanomaterials
- 2019Magnetic Interactions on Oxide Ferromagnet/Ferromagnetic Intermetallide Interfacecitations
- 2019MOKE Magnetometer Studies of Evaporated Ni and Ni/Cu Thin Films onto Different Substratescitations
- 2019Two temperature model for thermoacoustic sound generation in thick porous thermophonescitations
- 2019Highly confined radial contour modes in phononic crystal plate based on pillars with cap layerscitations
- 2019Highly confined radial contour modes in phononic crystal plate based on pillars with cap layerscitations
- 2018Acoustic isolation of disc shape modes using periodic corrugated plate based phononic crystalcitations
- 2018SPIN INTERACTIONS AT THE INTERFACES FERROMAGNETIC OXIDE/FERROMAGNETIC INTERMETALLIC SUPERLATTICE
- 20141 to 220 GHz complex permittivity behavior of flexible polydimethylsiloxane substratecitations
- 2014Theoretical and experimental investigation of Lamb waves characteristics in AlN/TiN and AlN/TiN/NCD composite membranescitations
- 2014Effect of thickness and deposition rate on the structural and magnetic properties of evaporated Fe/Al thin filmscitations
- 2014Characterization of multi-layered nanopore structure
- 2012A millimeter-wave elastomeric microstrip phase shiftercitations
- 2009AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuatorscitations
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document
AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
Abstract
Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AlN films that is sandwiched between two metallic electrodes. The thicknesses of AlN and diamond layers are 1μm and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.