| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cheneler, David
Lancaster University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Manufacture and calibration of high stiffness AFM cantilevers
- 2021Manufacture and calibration of high stiffness AFM cantilevers
- 2021Different approaches for manufacturing ti-6al-4v alloy with triply periodic minimal surface sheet-based structures by electron beam meltingcitations
- 2020Manufacture and calibration of high stiffness AFM cantilevers
- 2020Measurement and modelling of the elastic defection of novel metal syntactic foam composite sandwich structures in 3-point bendingcitations
- 2020The impact of post manufacturing treatment of functionally graded Ti6Al4V scaffolds on their surface morphology and mechanical strengthcitations
- 2020A fast and portable imager for neutron and gamma emitting radionuclidescitations
- 2019Surface temperature equalisation through automated laser vaporisation of thick film electrical heating elements
- 2017Liquid-like behaviour of gold nanowire bridgescitations
- 2016On the origin and magnitude of surface stresses due to metal nanofilmscitations
- 2014Transient bioimpedance monitoring of mechanotransduction in artificial tissue during indentationcitations
- 2013NEMS based tactile sensing in an artificial finger
- 2013Spherical indentation analysis of stress relaxation for thin film viscoelastic materialscitations
- 2013Degradation of polymer filmscitations
- 2011Characteristics and durability of fluoropolymer thin filmscitations
Places of action
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article
Characteristics and durability of fluoropolymer thin films
Abstract
The use of plasma-polymerised fluoropolymer (CF<sub>x</sub>O<sub>y</sub>) thin films in the manufacture of microelectromechanical systems (MEMS) devices is well-established, being employed in the passivation step of the deep reactive ion etching (DRIE) process, for example. This paper presents an investigation of the effect of exposure to organic and aqueous liquid media on plasma polymerised CF<sub>x</sub>O<sub>y</sub> thin films. Atomic force microscopy (AFM), scanning electron microscopy (SEM), ellipsometry, X-ray photoelectron spectroscopy (XPS) and dynamic wetting measurements were all employed as characterisation techniques. Highly basic aqueous solutions, including known silicon etchants, were found to cause delamination via degradation of the countersurface below the CF<sub>x</sub>O<sub>y</sub> thin film. Films were found to be stable in organic solvents, acidic aqueous solutions and slightly basic aqueous solutions.