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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Isoaho, Riku
Tampere University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2023Tuneable Nonlinear Spin Response in a Nonmagnetic Semiconductor
- 2021Room-temperature electron spin polarization exceeding 90% in an opto-spintronic semiconductor nanostructure via remote spin filteringcitations
- 2021Room-temperature electron spin polarization exceeding 90% in an opto-spintronic semiconductor nanostructure via remote spin filteringcitations
- 2019Influence of ex-situ annealing on the properties of MgF2 thin films deposited by electron beam evaporationcitations
- 2016High-efficiency GaInP/GaAs/GaInNAs solar cells grown by combined MBE-MOCVD techniquecitations
- 2016Determination of composition and energy gaps of GaInNAsSb layers grown by MBEcitations
- 2016Combined MBE-MOCVD process for high-efficiency multijunction solar cells
- 2016High efficiency multijunction solar cells: Electrical and optical properties of the dilute nitride sub-junctions
- 2015Dilute nitrides for boosting the efficiency of III-V multijunction solar cells
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article
Influence of ex-situ annealing on the properties of MgF2 thin films deposited by electron beam evaporation
Abstract
We report on the properties of magnesium fluoride (MgF2) thin films deposited by electron beam evaporation as a function of substrate deposition temperature and ex-situ annealing temperature. In particular, we report on the dependence of refractive index on annealing temperature, which can be used as a tuning parameter of the optical properties. Mechanical and structural properties of the films influenced by the annealing are also examined. Changing the substrate temperature from 50 °C to 240 °C caused a decrease of the refractive index and the lowest value of 1.36 (measured at 632.8 nm) was achieved for the substrate temperature of 240 °C. Rapid thermal annealing further decreased the refractive indices to slightly below 1.32. This could indicate increase in the film porousness and removal of adsorbed water molecules. Prior annealing the film surfaces were very smooth with root mean square and mean roughness below 1 nm. Annealing above 700 °C changed the structure of the films drastically, as they started to form a granular structure, while an annealing temperature of 1000 °C increased the refractive index to a value as high as 1.5. Using X-ray photoelectron spectroscopy we show that the surface of the films consist mainly of Mg and F atoms, but also small traces of C and O are present. The Mg:F ratio remained essentially the same (43:57) between different deposition temperatures. To demonstrate the need for post-deposition annealing treatment, we have also studied the aging effect in the MgF2 based anti-reflective coatings.