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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Kim, J.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (44/44 displayed)
- 2024Localization of Intramuscular mRNA Delivery using Deep Eutectic‐Lipid Nanocompositescitations
- 2023Momentum-independent magnetic excitation continuum in the honeycomb iridate H3LiIr2O6citations
- 2023Hybrid simultaneous laser- and ultrasonic-assisted machining of Ti-6Al-4V alloy
- 2023Hybrid-hybrid turning of micro-SiCp/AA2124 composites: A comparative study of laser-and-ultrasonic vibration-assisted machiningcitations
- 2023Glass-fiber mat/PA6 composite tubes subjected to dynamic axial crush loading—Experimental evaluation and high fidelity modeling of failure phenomenacitations
- 2022Multiple proliferation signaling pathways are modulated by octacalcium phosphate in osteoblasts.citations
- 2022Functional properties of Yttrium Iron Garnett thin films on graphene-coated Gd<sub>3</sub>Ga<sub>5</sub>O<sub>12</sub> for remote epitaxial transfercitations
- 2022Hybrid-hybrid machining of SiC-reinforced aluminium metal matrix compositecitations
- 2021Roughening improves hydrogen embrittlement resistance of Ti-6Al-4Vcitations
- 2021Investigation of hetero-phases grown via in-situ exsolution on a Ni-doped (La,Sr)FeO3 cathode and the resultant activity enhancement in CO2 reductioncitations
- 2021Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-off
- 2021Computational techniques for characterisation of electrically conductive MOFs : quantum calculations and machine learning approaches
- 2021Ultrasonically assisted turning of micro-SiCp/Al 2124 compositecitations
- 2021Superconducting Sr2RuO4 Thin Films without Out-of-Phase Boundaries by Higher-Order Ruddlesden-Popper Intergrowth
- 2020Fabrication of AlGaAs/GaAs/diamond heterojunctions for diamond-collector HBTscitations
- 2020Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-offcitations
- 2020Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-off
- 2020Experimental investigation into static and dynamic axial crush of composite tubes of glass-fiber mat/PA6 laminatescitations
- 2020Atomic-scale microstructure of metalhalide perovskitecitations
- 2020Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-off.
- 2019The CERN FCC Conductor Development Program: A Worldwide Effort for the Future Generation of High-Field Magnetscitations
- 2019Hybrid machining of metal-matrix compositecitations
- 2019Novel reusable renewable resource-based iron oxides nanocomposites for removal and recovery of phosphate from contaminated waterscitations
- 2019Origin of Performance Enhancement in TiO₂-Carbon Nanotube Composite Perovskite Solar Cells
- 2019Low-dimensional formamidinium lead perovskite architectures via controllable solvent intercalationcitations
- 2019Origin of performance enhancement in TiO2-carbon nanotube composite perovskite solar cellscitations
- 2019Silica-Based Infiltrations for Enhanced Zirconia-Resin Interface Toughnesscitations
- 2019Biocompatibility study of multi-layered hydroxyapatite coatings synthesized on Ti-6Al-4V alloys by RF magnetron sputtering for prosthetic-orthopaedic implant applicationscitations
- 2017Controlling hybrid nonlinearities in transparent conducting oxides via two-colour excitationcitations
- 2017Hidden magnetic states emergent under electric field, in a room temperature composite magnetoelectric multiferroic
- 2017Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma dopingcitations
- 2017Enhanced nonlinear refractive index in ε-near-zero materialscitations
- 2016Enhanced nonlinear refractive index in ε -near-zero materialscitations
- 2016Enhanced Nonlinear Refractive Index in epsilon-Near-Zero Materialscitations
- 2016Enhanced nonlinear refractive index in epsilon-near-zero materialscitations
- 2016Structural relaxation in Fe(Co)SiAlGaPCB amorphous alloyscitations
- 2015Wearable temporary tattoo sensor for real-time trace metal monitoring in human sweatcitations
- 2014Binary metal oxides for composite ultrafiltration membranescitations
- 2012Measurements of the T2K neutrino beam properties using the INGRID on-axis near detectorcitations
- 2010Investigation of size effects of very thin aluminum and copper sheets using aero-bulge testcitations
- 2006Grain boundary energy and grain growth in Al filmscitations
- 2006New Yb:Hf-doped silica fiber for high-power fiber laserscitations
- 2005High-field superconductivity in alloyed MgB2 thin filmscitations
- 2004Passively Q-switched thulium-doped silica fiber laser
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article
Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping
Abstract
© 2017 Elsevier B.V. Plasma doping ion implantation (PLAD) is becoming increasingly important in the manufacture of advanced semiconductor device structures but a fundamental understanding of PLAD is complicated. A model of PLAD into planar substrates has been constructed using the one dimensional computer code TRIDYN to predict collision cascades and hence substrate compositional changes during implantation. Medium Energy Ion Scattering (MEIS) measurements of dopant profiles in PLAD processed samples were used to calibrate the input ion and neutral fluxes to the model. Rules could then be proposed for how post implant profiles should be modified by a cleaning step. This learning was applied to a three dimensional TRI3DYN based model for PLAD implants into FinFET like structures. Comparison of the model to dopant profile measurements made by time of flight (TOF)-MEIS revealed the angular distributions of neutral species and doping mechanisms acting in three dimensional structures.