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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Grande, P. L.
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Topics
Publications (6/6 displayed)
- 2020Elucidating the capability of electron backscattering for 3D nano-structure determinationcitations
- 2020The effect of ion implantation on reflection electron energy loss spectroscopycitations
- 2019Characterization of oxygen self-diffusion in TiO2 resistive-switching layers by nuclear reaction profilingcitations
- 2018The influence of shallow core levels on the shape of REELS spectracitations
- 2015Neutralization and wake effects on the Coulomb explosion of swift H2+ ions traversing thin filmscitations
- 2014The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx filmscitations
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article
The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx films
Abstract
<p>Electrons scattered over large angles at relatively high energies (40 keV) are used to study NbO<sub>x</sub> films. These films were deposited by reactive sputter deposition on a Si substrate using a Nb target and an Ar/O<sub>2</sub> gas mixture. Energy spectra of electrons scattered from such samples exhibit elastic scattering peaks for each component due to the energy difference associated with scattering from different masses. The spectra provide in this way information about the film thickness as well as its stoichiometry. The stoichiometry and the deposition rate depends on the concentration of O<sub>2</sub> in the mixture. For Nb<sub>2</sub>O<sub>5</sub>-like films the energy loss measurements also give an estimate of the band gap, but for Nb films with lower O concentration the band gap is not resolved. This work illustrates the possibility of characterizing modern transition metal oxide films in a fairly simple electron scattering experiment.</p>