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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Vos, Maarten
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (18/18 displayed)
- 2020Elucidating the capability of electron backscattering for 3D nano-structure determinationcitations
- 2020The effect of ion implantation on reflection electron energy loss spectroscopycitations
- 2019Characterization of oxygen self-diffusion in TiO2 resistive-switching layers by nuclear reaction profilingcitations
- 2018Room temperature synthesis of HfO2/HfO x heterostructures by ion-implantationcitations
- 2018Room temperature synthesis of HfO2/HfO x heterostructures by ion-implantationcitations
- 2018The influence of shallow core levels on the shape of REELS spectracitations
- 2016A model dielectric function for low and very high momentum transfercitations
- 2016Measurement of the band gap by reflection electron energy loss spectroscopycitations
- 2015Energy Loss Function of Solids Assessed by Ion Beam Energy-Loss Measurements: Practical Application to Ta2O5citations
- 2015Energy Loss Function of Solids Assessed by Ion Beam Energy-Loss Measurementscitations
- 2015Neutralization and wake effects on the Coulomb explosion of swift H2+ ions traversing thin filmscitations
- 2014Direct observation of the major components of mouse bones and related compounds by electron Rutherford backscattering spectroscopy
- 2014The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx filmscitations
- 2010Experimental observation of the strong influence of crystal orientation on Electron Rutherford Backscattering Spectracitations
- 2007Electron inelastic mean free path in solids as determined by electron Rutherford back-scatteringcitations
- 2007Metal interface formation studied by high-energy reflection energy loss spectroscopy and electron Rutherford backscatteringcitations
- 2005Spectral momentum densities of vanadium and vanadium oxide as measured by high energy (e, 2e) spectroscopycitations
- 2005Electron and neutron scattering from polymer films at high momentum transfercitations
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article
The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx films
Abstract
<p>Electrons scattered over large angles at relatively high energies (40 keV) are used to study NbO<sub>x</sub> films. These films were deposited by reactive sputter deposition on a Si substrate using a Nb target and an Ar/O<sub>2</sub> gas mixture. Energy spectra of electrons scattered from such samples exhibit elastic scattering peaks for each component due to the energy difference associated with scattering from different masses. The spectra provide in this way information about the film thickness as well as its stoichiometry. The stoichiometry and the deposition rate depends on the concentration of O<sub>2</sub> in the mixture. For Nb<sub>2</sub>O<sub>5</sub>-like films the energy loss measurements also give an estimate of the band gap, but for Nb films with lower O concentration the band gap is not resolved. This work illustrates the possibility of characterizing modern transition metal oxide films in a fairly simple electron scattering experiment.</p>