693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Zdunek, Joanna
Warsaw University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (34/34 displayed)
- 2023Comparison of the performance properties of commercially produced roller cone bit coatingscitations
- 2021Influence of an aluminizing process on the microstructure and tensile strength of the nickel superalloy IN 718 produced by the Selective Laser Meltingcitations
- 2021Microstructure and Thermoelectric Properties of Doped FeSi2 with Addition of B4C Nanoparticlescitations
- 2021Influence of Hydrostatic Extrusion on the Mechanical Properties of the Model Al-Mg Alloyscitations
- 2020Internal nanocrystalline structure and stiffness alterations of electrospun polycaprolactone-based mats after six months of in vitro degradation. An atomic force microscopy assaycitations
- 2019Structural and electrical studies on Ti/Al-based Au-free ohmic contact metallization for AlGaN/GaN HEMTscitations
- 2019The influence of Mg addition and hydrostatic extrusion HE on the repassivation ability of pure Al, AlMg1 and AlMg3 model alloys in 3.5 wt-% NaClcitations
- 2019Microstructure and thermoelectric properties of p and n type doped β-FeSi2 fabricated by mechanical alloying and pulse plasma sinteringcitations
- 2019New approach to amorphization of alloys with low glass forming ability via selective laser meltingcitations
- 2019Analysis of residual stress in 1.4539 austenitic steel joints welded with TIG method
- 2019Texture, residual stresses and mechanical properties analysis in the commercial 1.4462 duplex stainless steel subjected to hydrostatic extrusioncitations
- 2019The influence of combined hydrostatic extrusion and rolling on the microstructure, texture and mechanical properties of Al-Li alloyscitations
- 2018The crossed – lamellar structure of mollusk shells as biocomposite material
- 2018Formation of the Nitrided Layers on an Austenitic Stainless Steel with Different Grain Structurescitations
- 2018The Influence of Selective Laser Melting (SLM) Process Parameters on In-Vitro Cell Responsecitations
- 2018Effect of structure on corrosion resistance of Mg-Zn-Ca alloy
- 2017Microstructure and strain-stress analysis of the dynamic strain aging in inconel 625 at high temperature citations
- 2017Microstructure and mechanical properties investigation of CP titanium processed by selective laser melting (SLM)citations
- 2017Influence of hydrostatic extrusion process on the microstructure and texture of polycrystalline nickelcitations
- 2017The effect of current types on the microstructure and corrosion properties of Ni/NANOAl2O3 composite coatings
- 2017Heterogeneity of deformation in duplex stainless steel subjected to hydrostatic extrusion
- 2016Synthesis of the RGO/Al2O3 core-shell nanocomposite flakes and characterization of their unique electrostatic properties using zeta potential measurementscitations
- 2016Evolution of microstructure and precipitates in 2xxx aluminum alloy after severe plastic deformationcitations
- 2016Influence of the corrosive environment on the Portevin–Le Chatelier plastic instability phenomenon in Al–1Mg and Al–3Mg model alloys
- 2016Microwave Plasma Chemical Vapor Deposition of SbxOy/C negative electrodes and their compatibility with lithium and sodium Hückel salts - Based, tailored electrolytescitations
- 2016Microstructure evolution and texture development in a Cu-8.5%at. Al material subjected to hydrostatic extrusioncitations
- 2016Investigation of the degradation mechanism of catalytic wires during oxidation of ammonia processcitations
- 2015Influence of the Al (Co, Ni) layer on the corrosion resistance of a cobalt based alloy (Mar-M-509®)citations
- 2015Microstructure and Texture of Hydrostatic Extrusion Deformed Ni Single Crystals and Polycrystalcitations
- 2014Electrochemical and cellular behavior of ultrafine-grained titanium in vitrocitations
- 2014Influence of casting method and heat treatment for corrosion resistance of magnesium alloy AZ91D
- 2013Investigation of degradation mechanism of palladium-nickel wires during oxidation of ammoniacitations
- 2013Analysis of two catalytic systems PtRhPd-PdAu and PtRh-PdAu after long-term exploitation
- 2006Influence of severe plastic deformation on the PLC effect and mechanical properties in Al 5XXX alloy
Places of action
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article
Structural and electrical studies on Ti/Al-based Au-free ohmic contact metallization for AlGaN/GaN HEMTs
Abstract
In order to fabricate the AlGaN/GaN-on-Si HEMTs on existing Si-CMOS production lines, manufacturing processes must meet the rigors of Si-CMOS technology eliminating Au. One of the requirements is formation of Au free, low resistivity ohmic contacts to AlGaN/GaN heterostructures. In this work we report structural and electrical studies of Ti/Al-based ohmic contacts to AlGaN/GaNHEMTs with TiN/Cu cover layers. Ohmic contacts have been observed after annealing of Ti/Al/TiN/Cu or Ti/Al/Ti/TiN/Cu/TiN multilayers on recessed AlGaN/ GaN structure at temperature of 550°C, specific contact resistance is about 2.3×10−4 Ωcm2, however, lower value was obtained after annealing at 750°C. The XRD and TEM studies reveal formation of additional phases during annealing, namely Al3Ti and Ti2AlN inside the volume of the metallization stack and AlN at metal/GaN interface. Measured dependence of contact resistance on temperature suggests a “metal-like” carrier transport mechanism in partially recessed Ti/Al/Ti/TiN/Cu ohmic contact to 2D electron gas.