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Lavareda, Guilherme
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Publications (5/5 displayed)
- 2005ITO films with enhanced electrical properties deposited on unheated ZnO-coated polymer substratescitations
- 2004Properties of ITO films deposited by plasma enhanced RTE on unheated polymer sheets - dependence on rf electrode distance from substratescitations
- 2004ITO films deposited by rf-PERTE on unheated polymer substrates - Properties dependence on In-Sn alloy compositioncitations
- 2004Enhancement of the electrical properties of ITO deposited on polymeric substrates by using a ZnO buffer layercitations
- 2002Effect of thickness on the properties of ITO thin films deposited by RF-PERTE on unheated, flexible, transparent substratescitations
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article
ITO films deposited by rf-PERTE on unheated polymer substrates - Properties dependence on In-Sn alloy composition
Abstract
The study of the influence of different tin concentrations in the In-Sn alloy on the properties of indium tin oxide (ITO) thin films deposited by radio frequency (rf) plasma enhanced reactive thermal evaporation (rf-PERTE) onto flexible polymer and window glass substrates at room temperature is presented. The polymer substrate used is polyethylene terephthalate (PET). The tin concentration in the source alloy varied in the range 5-20wt.%. The average thickness of the ITO films is of about 90nm. Results show that ITO thin films deposited on PET from the evaporation of a 85%In:15%Sn alloy exhibit the following characteristics: An average visible transmittance of 80% and an electrical resistivity of 1.6×10-3Ωcm. On glass the value of the average visible transmittance increases (85%) and the resistivity decreases to 7.6×10-4Ωcm. The electrical properties of ITO films on PET are largely affected by the low carrier mobility.