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Soboyejo, W. O.
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Publications (6/6 displayed)
- 2020Drug-encapsulated blend of PLGA-PEG microspheres: in vitro and in vivo study of the effects of localized/targeted drug delivery on the treatment of triple-negative breast cancercitations
- 2013Role of oxide thickening in fatigue crack initiation in LIGA nickel MEMS thin filmscitations
- 2008Fatigue and fracture of a bulk nanocrystalline NiFe alloycitations
- 2007Fatigue of LIGA Ni micro-electro-mechanical system thin filmscitations
- 2007Mechanisms of fatigue in LIGA Ni MEMS thin filmscitations
- 2002Microstructure and mechanical properties of a β Nb-Ti based alloycitations
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article
Mechanisms of fatigue in LIGA Ni MEMS thin films
Abstract
This paper presents the results of an experimental study of the mechanisms of fatigue in LIGA Ni micro-electro-mechanical systems (MEMS) thin films with micro-scale columnar and nano-scale equiaxed grains. Stress-life behavior is reported for films with thicknesses of 70 and 270 μm. The stress-life data are compared with previously reported data for Ni MEMS films and bulk Ni. The films with the nano-scale grains (15 nm average grain size) are shown to have higher strength and fatigue resistance (stress-life data) than those with columnar grain structures. The thicker films (with a columnar microstructure) are also shown to have comparable fatigue life to annealed Ni, while the thinner films (with a columnar microstructure) have comparable fatigue life to wrought Ni. The underlying mechanisms of crack nucleation and growth are elucidated via scanning and transmission electron microscopy. These reveal the formation of slip bands and surface oxides and crystallographic surface/sub-surface crack nucleation and growth in the films with the columnar structures. Surface and corner crack nucleations (from pre-existing defects) are observed in the nanostructured films. The implications of the results are discussed for the analyses of fatigue in nickel MEMS structures. © 2006 Elsevier B.V. All rights reserved.