| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Joo, Young-Chang
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2020Direct observation and catalytic role of mediator atom in 2D materialscitations
- 2020Photoelectrochemical CO2 Reduction via Cu2O/CuFeO2 Hierarchical nanorods photocatalystcitations
- 2016Electromigration behavior of advanced metallization on the structural effects for memory devicescitations
- 2015Improvements of mechanical fatigue reliability of Cu interconnects on flexible substrates through MoTi alloy under-layercitations
Places of action
| Organizations | Location | People |
|---|
article
Electromigration behavior of advanced metallization on the structural effects for memory devices
Abstract
We investigated the kinetics of the electromigration (EM) phenomenon regarding not only metal line materials (Al, W, Cu) but also multiple structures of the Cu metal line under various electric conditions: direct current (DC), alternating current (AC) and pulsed DC. Under DC stressing, the W line had the longest EM failure lifetime, and the Al line had the weakest EM lifetime among Al, W and Cu materials due to the different diffusivity of the constitutional atoms. Lateral voids induced by joule heating were observed at the W contact of the Cu line fed with W, which decreased the lifetime compared with the Cu line fed with Cu. Although the mean time-to-failure was independent of the frequency of pulsed DC, the lifetime of the Cu line increased with the off-time of pulsed DC because the atomic migration was relaxed during the off-time period. This study provides guidelines for highly reliable memory devices with respect to multi-component structures under users' circumstances.