| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Schmid, Silvan
TU Wien
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2019Thin Film Analysis by Nanomechanical Infrared Spectroscopycitations
- 2016Nonlinear optomechanical measurement of mechanical motioncitations
- 2014Single-layer graphene on silicon nitride micromembrane resonatorscitations
- 2014Single-layer graphene on silicon nitride micromembrane resonatorscitations
- 2014Micromechanical String Resonators: Analytical Tool for Thermal Characterization of Polymerscitations
- 2013Optical detection of radio waves through a nanomechanical transducer
- 2011Biodegradable micromechanical sensors
- 2011Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensingcitations
- 2011Superparamagnetic photocurable nanocomposite for the fabrication of microcantileverscitations
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article
Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing
Abstract
Polymer coated ceramic cantilevers are highly sensitive to temperature changes, due to the large difference in coefficient of thermal expansion of the two materials. Silicon rich nitride (SRN) cantilevers coated with SU-8 for temperature sensing were fabricated and tested. The devices were coated with SU-8 through spin coating before they were released to obtain bimorph cantilevers. Deflection versus temperature measurements were carried out in ambient and nitrogen atmosphere. In ambient atmosphere, two different effects were observed as the temperature was cycled between 20 and 50°C; (i) shrinkage of SU-8 with increasing temperature, due to evaporation of absorbed moisture and (ii) thermal expansion of SRN and SU-8. Separately, these two effects generate bending in opposite direction. The observed overall bending was seen to be a combination of both. In nitrogen atmosphere, the cantilevers showed a unidirectional deflection versus temperature characteristic. Transverse bending of the cantilevers resulted in an increased rigidity of the cantilevers which could explain the ∼50% lower temperature response compared to the theoretical values.