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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Bollani, M.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2022Photon management in SiO2-SnO2:Yb3+ hybrid 1D microcavitycitations
- 2021Assessment of SnO2-nanocrystal-based luminescent glass-ceramic waveguides for integrated photonicscitations
- 2021Engineering of the spin on dopant process on silicon on insulator substratecitations
- 2021Large-area nanocrystalline caesium lead chloride thin films: A focus on the exciton recombination dynamicscitations
- 2015SiGe nano-stressors for Ge strain-engineering
- 2015Three-dimensional fabrication of free-standing epitaxial semiconductor nanostructures obtained by focused ion beamcitations
- 2015Micro and nanofabrication of SiGe/Ge bridges and membranes by wet-anisotropic etchingcitations
- 2014Monitoring the kinetic evolution of self-assembled SiGe islands grown by Ge surface thermal diffusion from a local sourcecitations
- 2013Strain-induced generation of silicon nanopillarscitations
- 2013Ordered arrays of Si and Ge nanocrystals via dewetting of pre-patterned thin filmscitations
- 2012Design of free patterns of nanocrystals with ad hoc features via templated dewettingcitations
- 2009Raman spectroscopy for the analysis of temperature-dependent plastic relaxation of SiGe layers
- 2004High mobility SiGe heterostructures fabricated by low-energy plasma-enhanced chemical vapor depositioncitations
- 2001Experimental evidence and computational analysis of the electronic density modulation induced by gaseous molecules at Si(001) surfaces upon self-assembling organic monolayercitations
- 2000Final evidence for H termination of HF-treated Si surfaces: a comparative study by high-energy and vibrational spectroscopies
- 2000Chemically induced disordering of Si (100) surfaces upon SC1/SC2 etching analysed by high-resolution transmission electron microscopycitations
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article
High mobility SiGe heterostructures fabricated by low-energy plasma-enhanced chemical vapor deposition
Abstract
We present results obtained on modulation-doped quantum wells with compressively strained Ge channels. The heterostructures have been grown by low-energy plasma-enhanced chemical vapor deposition (LEPECVD). Magnetotransport measurements were carried out both on van der Pauw squares and lithographically defined Hall bars. The 2 K hole mobility increases with sheet density, and exceeds 10<sup>5</sup> cm<sup>2</sup> V<sup>−1</sup> s<sup>−1</sup> below 40 K for carrier densities above 8 × 10<sup>11</sup> cm<sup>−2</sup>. It is dominated by remote impurity scattering, according to linear transport theory calculations. The same conclusion follows from the Dingle ratios of 5–10 derived from the low-field longitudinal magnetoresistance. Room-temperature channel mobilities were extracted from the magnetic field dependence of longitudinal and transverse magnetoresistance by means of mobility spectrum analysis. We obtained 2940 cm<sup>2</sup> V<sup>−1</sup> s<sup>−1</sup> at a sheet hole density of 5.7 × 10<sup>11</sup> cm<sup>−2</sup>.