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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Terwagne, G.
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Topics
Publications (6/6 displayed)
- 2023Formation of crystalline Si 1-x Ge x top layers by ion implantation in crystalline siliconcitations
- 2018Blocking germanium diffusion inside silicon dioxide using a co-implanted silicon barriercitations
- 2011Study of carbon nitride compounds synthesised by co-implantation of C and N in copper at different temperaturescitations
- 2011Study of carbon nitride compounds synthesised by co-implantation of 13 C and 14 N in copper at different temperaturescitations
- 2011Study of carbon nitride compounds synthesised by co-implantation of 13C and 14N in copper at different temperaturescitations
- 2007Titanium oxynitride thin films sputter deposited by the reactive gas pulsing processcitations
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article
Study of carbon nitride compounds synthesised by co-implantation of 13C and 14N in copper at different temperatures
Abstract
Carbon nitride compouns have been synthesised in copper by simultatneous high fluence (10<sup>18</sup> at/cm²) implantation of <sup>13</sup>C and <sup>14</sup>N ions. During the implantation process, the substrate temperature was maintained at 25, 250, 350 or 450°C. Depth profiles of <sup>13</sup>C and <sup>14</sup>N were determined using hte non-resonant nuclear reactions (NRA) induced by a 1.05 MeV deuteron beam. The retained doses were deduced from NRA measurements and compared to the implanted fluence. The chemical bonds between the carbon and nitrogen were studied as a function of depth and temperature by X-ray photoelectron spectroscopy (XPS). The curve fitting of C1s and N1s core level photoelectron spectra reveal different types of C-N bonds and show the signature of N2 molecules. The presence of nitrogen gas bubbles in copper was highlighted by mass spectroscopy. The structure of carbon nitride compounds was characterised by transmission electron microscopy (TEM). For that purpose, corss-sectional samples were prepared using a focused ion beam (FIB) systeme. TEM observations showed the presence of small amorphous carbon nitride "nano-capsules" and large gas bubbles in copper. Based on our observations, we propose a model for the growth of these nano-objects. Finall, the mechanical properties of the implanted samples were investigated by nano-indentation.