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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Kadkhodazadeh, Shima
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (23/23 displayed)
- 2022Photo-stimulated hydrogen desorption from magnesium nanoparticlescitations
- 2022Photo-stimulated hydrogen desorption from magnesium nanoparticlescitations
- 2022High resolution crystal orientation mapping of ultrathin films in SEM and TEMcitations
- 2022High resolution crystal orientation mapping of ultrathin films in SEM and TEMcitations
- 2021Initiation and Progression of Anisotropic Galvanic Replacement Reactions in a Single Ag Nanowire:Implications for Nanostructure Synthesiscitations
- 2021Initiation and Progression of Anisotropic Galvanic Replacement Reactions in a Single Ag Nanowirecitations
- 2020Aminopropylsilatrane Linkers for Easy and Fast Fabrication of High-Quality 10 nm Thick Gold Films on SiO2 Substratescitations
- 2020Optical and electronic properties of low-density InAs/InP quantum-dot-like structures designed for single-photon emitters at telecom wavelengthscitations
- 2020Aminopropylsilatrane Linkers for Easy and Fast Fabrication of High-Quality 10 nm Thick Gold Films on SiO 2 Substratescitations
- 2019Rationally Designed PdAuCu Ternary Alloy Nanoparticles for Intrinsically Deactivation-Resistant Ultrafast Plasmonic Hydrogen Sensingcitations
- 2019Metal-polymer hybrid nanomaterials for plasmonic ultrafast hydrogen detectioncitations
- 2019Metal-polymer hybrid nanomaterials for plasmonic ultrafast hydrogen detectioncitations
- 2019Optical property – composition correlation in noble metal alloy nanoparticles studied with EELScitations
- 2018Probing the chemistry of adhesion between a 316L substrate and spin-on-glass coatingcitations
- 2017The substrate effect in electron energy-loss spectroscopy of localized surface plasmons in gold and silver nanoparticlescitations
- 2017The substrate effect in electron energy-loss spectroscopy of localized surface plasmons in gold and silver nanoparticlescitations
- 2017Interfacial Interaction of Oxidatively Cured Hydrogen Silsesquioxane Spin-On-Glass Enamel with Stainless Steel Substratecitations
- 2017Broadband infrared absorption enhancement by electroless-deposited silver nanoparticlescitations
- 2014New amorphous interface for precipitate nitrides in steelcitations
- 2013Electron Energy Loss and One- and Two-Photon Excited SERS Probing of “Hot” Plasmonic Silver Nanoaggregatescitations
- 2011Towards quantitative three-dimensional characterisation of InAs quantum dots
- 2010Mapping boron in silicon solar cells using electron energy-loss spectroscopy
- 2010Mapping boron in silicon solar cells using electron energy-loss spectroscopy
Places of action
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article
High resolution crystal orientation mapping of ultrathin films in SEM and TEM
Abstract
Ultrathin metallic films are important functional materials for optical and microelectronic devices. Dedicated characterization with high spatial resolution and sufficient field of view is key to the understanding of the relation between microstructure and optical and electrical properties of such thin films. Here, we have applied on-axis transmission Kikuchi diffraction (TKD) and scanning precession electron diffraction (SPED) to study the microstructure of 10 nm thick polycrystalline gold films. The study compares the results obtained from the same specimen region by the two techniques and provides insights on the limits of each diffraction technique. We compare the physical spatial resolution of on-axis TKD and SPED and discuss challenges due to the larger probe size in scanning electron microscopy (SEM). Moreover, we present an improvement for the physical spatial resolution (PSR) of on-axis TKD through acquisition in immersion mode. We show how this method extends the capabilities of SEM-based microstructure characterization of ultrathin films and achieve PSR comparable to semi-automated SPED.