| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Younesi, Reza
Uppsala University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (22/22 displayed)
- 2022Importance of Superstructure in Stabilizing Oxygen Redox in P3-Na0.67Li0.2Mn0.8O2citations
- 2022Concentrated LiFSI-Ethylene Carbonate Electrolytes and Their Compatibility with High-Capacity and High-Voltage Electrodescitations
- 2022Importance of superstructure in stabilizing oxygen redox in P3- Na0.67Li0.2Mn0.8O2citations
- 2022Importance of superstructure in stabilizing oxygen redox in P3- Na 0.67 Li 0.2 Mn 0.8 O 2citations
- 2021On the Manganese Dissolution Process from LiMn2O4 Cathode Materialscitations
- 2021Vacancy enhanced oxygen redox reversibility in P3-type magnesium doped sodium manganese oxide Na0.67Mg0.2Mn0.8O2citations
- 2021Prospects for Improved Magnesocene-Based Magnesium Battery Electrolytescitations
- 2021Importance of superstructure in stabilizing oxygen redox in P3- Na0.67Li0.2Mn0.8O2citations
- 2020Vacancy enhanced oxygen redox reversibility in P3-type magnesium doped sodium manganese oxide Na 0.67 Mg 0.2 Mn 0.8 O 2citations
- 2020Vacancy enhanced oxygen redox reversibility in P3-type magnesium doped sodium manganese oxide Na0.67Mg0.2Mn0.8O2citations
- 2020How Mn/Ni Ordering Controls Electrochemical Performance in High-Voltage Spinel LiNi0.44Mn1.56O4 with Fixed Oxygen Contentcitations
- 2020How Mn/Ni Ordering Controls Electrochemical Performance in High-Voltage Spinel LiNi0.44Mn1.56O4with Fixed Oxygen Contentcitations
- 2020How Mn/Ni Ordering Controls Electrochemical Performance in High-Voltage Spinel LiNi 0.44 Mn 1.56 O 4 with Fixed Oxygen Contentcitations
- 2020Acetonitrile‐Based Electrolytes for Rechargeable Zinc Batteriescitations
- 2019Towards room temperature operation of all-solid-state Na-ion batteries through polyester-polycarbonate-based polymer electrolytescitations
- 2017Electrochemical performance and interfacial properties of Li-metal in lithium bis(fluorosulfonyl)imide based electrolytescitations
- 2017Simple and Green Method for Fabricating V2O5·nH2O Nanosheets for Lithium Battery Application
- 2015Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin filmscitations
- 2015Capillary based Li-air batteries for in situ synchrotron X-ray powder diffraction studiescitations
- 2014Ionic conductivity and the formation of cubic CaH 2 in the LiBH 4 -Ca(BH 4 ) 2 compositecitations
- 2014Ionic conductivity and the formation of cubic CaH2 in the LiBH4-Ca(BH4)2 compositecitations
- 2014In Situ Synchrotron XRD on a Capillary Li-O2 Battery Cell
Places of action
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article
Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin films
Abstract
The nitrogen dissociation and plasma parameters during radio frequency sputtering of lithium phosphorus oxynitride thin films in nitrogen gas are investigated by mass appearance spectrometry, electrostatic probes and optical emission spectroscopy, and the results are correlated with electrochemical properties and microstructure of the films. Low pressure and moderate power are associated with lower plasma density, higher electron temperature, higher plasma potential and larger diffusion length for sputtered particles. This combination of parameters favors the presence of more atomic nitrogen, a fact that correlates with a higher ionic conductivity. Despite of lower plasma density the film grows faster at lower pressure where the higher plasma potential, translated into higher energy for impinging ions on the substrate, resulted in a compact and smooth film structure. Higher pressures showed much less nitrogen dissociation and lower ion energy with thinner films, less ionic conductivity and poor film structure with large roughness.