| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Stamate, Eugen
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2024Oxygen-defective electrostrictors for soft electromechanicscitations
- 2024Oxygen-defective electrostrictors for soft electromechanicscitations
- 2022Silver-substituted (Ag1-xCux)2ZnSnS4 solar cells from aprotic molecular inkscitations
- 2022Silver-substituted (Ag1-xCux)2ZnSnS4 solar cells from aprotic molecular inkscitations
- 2022Development of an SFMM/CGO composite electrode with stable electrochemical performance at different oxygen partial pressurescitations
- 2022Development of an SFMM/CGO composite electrode with stable electrochemical performance at different oxygen partial pressurescitations
- 2022Development of an SFMM/CGO composite electrode with stable electrochemical performance at different oxygen partial pressurescitations
- 2020Low-temperature preparation and investigation of electrochemical properties of SFM/CGO composite electrodecitations
- 2020Low-temperature preparation and investigation of electrochemical properties of SFM/CGO composite electrodecitations
- 2020Energy band alignment at the heterointerface between CdS and Ag-alloyed CZTScitations
- 2020Energy band alignment at the heterointerface between CdS and Ag-alloyed CZTScitations
- 2020Energy band alignment at the heterointerface between CdS and Ag-alloyed CZTScitations
- 2020Monolithic thin-film chalcogenide–silicon tandem solar cells enabled by a diffusion barriercitations
- 2020Persistent Double-Layer Formation in Kesterite Solar Cells: A Critical Reviewcitations
- 2020Persistent Double-Layer Formation in Kesterite Solar Cells: A Critical Reviewcitations
- 2019Thin films of CZTS and CZTO for solar cells produced by pulsed laser deposition
- 2019Thin films of CZTS and CZTO for solar cells produced by pulsed laser deposition
- 2015Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin filmscitations
- 2014Status and challenges in electrical diagnostics of processing plasmascitations
- 2013A modified anode/electrolyte structure for a solid oxide electrochemical cell and a method for making said structure
- 2011Metallic and Insulating Interfaces of Amorphous SrTiO3-Based Oxide Heterostructurescitations
Places of action
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article
Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin films
Abstract
The nitrogen dissociation and plasma parameters during radio frequency sputtering of lithium phosphorus oxynitride thin films in nitrogen gas are investigated by mass appearance spectrometry, electrostatic probes and optical emission spectroscopy, and the results are correlated with electrochemical properties and microstructure of the films. Low pressure and moderate power are associated with lower plasma density, higher electron temperature, higher plasma potential and larger diffusion length for sputtered particles. This combination of parameters favors the presence of more atomic nitrogen, a fact that correlates with a higher ionic conductivity. Despite of lower plasma density the film grows faster at lower pressure where the higher plasma potential, translated into higher energy for impinging ions on the substrate, resulted in a compact and smooth film structure. Higher pressures showed much less nitrogen dissociation and lower ion energy with thinner films, less ionic conductivity and poor film structure with large roughness.