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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Holtappels, Peter
Karlsruhe Institute of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (28/28 displayed)
- 2022Electrochemical Study of Symmetrical Intermediate Temperature - Solid Oxide Fuel Cells based on La 0.6 Sr 0.4 MnO 3 / Ce 0.9 Gd 0.1 O 1.95 for Operation in Direct Methane / Aircitations
- 2022Electrochemical Study of Symmetrical Intermediate Temperature - Solid Oxide Fuel Cells based on La0.6Sr0.4MnO3 / Ce0.9Gd0.1O1.95 for Operation in Direct Methane / Aircitations
- 2021Synthesis and electrochemical characterization of La 0.6 Sr 0.4 Co 0.2 Fe 0.8 O 3–δ / Ce 0.9 Gd 0.1 O 1.95 co-electrospun nanofiber cathodes for intermediate-temperature solid oxide fuel cellscitations
- 2021Synthesis and electrochemical characterization of La0.6Sr0.4Co0.2Fe0.8O3–δ / Ce0.9Gd0.1O1.95 co-electrospun nanofiber cathodes for intermediate-temperature solid oxide fuel cellscitations
- 2021Synthesis, characterization, fabrication, and electrochemical performance of transition metal doped LSCTA- as anode candidates for SOFCScitations
- 2019Combining Transition Metals – An Approach towards High-Performing Coking Tolerant Solid Oxide Fuel Cell Anodescitations
- 2019Silver Modified Cathodes for Solid Oxide Fuel Cellscitations
- 2019Silver Modified Cathodes for Solid Oxide Fuel Cellscitations
- 2019Testing Novel Nickel and Cobalt Infiltrated STN Anodes for Carbon Tolerance using In Situ Raman Spectroscopy and Electrochemical Impedance Spectroscopy in Fuel Cellscitations
- 2018Novel Processing of Cathodes for Solid Oxide Fuel Cells
- 2018Novel Processing of Cathodes for Solid Oxide Fuel Cells
- 2018Scaling up aqueous processing of A-site deficient strontium titanate for SOFC anode supportscitations
- 2017Development of redox stable, multifunctional substrates for anode supported SOFCS
- 2017Novel materials for more robust solid oxide fuel cells in small scale applications
- 2015Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin filmscitations
- 2015In Situ Studies of Fe4+ Stability in β-Li3Fe2(PO4)3 Cathodes for Li Ion Batteriescitations
- 2015Need for In Operando Characterization of Electrochemical Interface Features
- 2014Composite Fe - BaCe0.2Zr0.6Y0.2O2.9 Anodes for Proton Conductor Fuel Cellscitations
- 2014Composite Fe - BaCe 0.2 Zr 0.6 Y 0.2 O 2.9 Anodes for Proton Conductor Fuel Cellscitations
- 2013Pressurized HxCyOz Cells at ca. 250 °C: Potential and Challenges
- 2013Full Ceramic Fuel Cells Based on Strontium Titanate Anodes, An Approach Towards More Robust SOFCscitations
- 2013Full Ceramic Fuel Cells Based on Strontium Titanate Anodes, An Approach Towards More Robust SOFCscitations
- 2013Ni-Based Solid Oxide Cell Electrodescitations
- 2013Pressurized H x C y O z Cells at ca. 250 °C: Potential and Challenges
- 2012Fundamental Material Properties Underlying Solid Oxide Electrochemistry
- 2010On the synthesis and performance of flame-made nanoscale La 0.6 Sr 0.4 CoO 3-δ and its influence on the application as an intermediate temperature solid oxide fuel cell cathodecitations
- 2010On the synthesis and performance of flame-made nanoscale La0.6Sr0.4CoO3−δ and its influence on the application as an intermediate temperature solid oxide fuel cell cathodecitations
- 2009Pre-edges in oxygen (1 s ) x-ray absorption spectra: a spectral indicator for electron hole depletion and transport blocking in iron perovskitescitations
Places of action
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article
Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin films
Abstract
The nitrogen dissociation and plasma parameters during radio frequency sputtering of lithium phosphorus oxynitride thin films in nitrogen gas are investigated by mass appearance spectrometry, electrostatic probes and optical emission spectroscopy, and the results are correlated with electrochemical properties and microstructure of the films. Low pressure and moderate power are associated with lower plasma density, higher electron temperature, higher plasma potential and larger diffusion length for sputtered particles. This combination of parameters favors the presence of more atomic nitrogen, a fact that correlates with a higher ionic conductivity. Despite of lower plasma density the film grows faster at lower pressure where the higher plasma potential, translated into higher energy for impinging ions on the substrate, resulted in a compact and smooth film structure. Higher pressures showed much less nitrogen dissociation and lower ion energy with thinner films, less ionic conductivity and poor film structure with large roughness.