| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Thydén, Karl Tor Sune
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (20/20 displayed)
- 2018Deposition of highly oriented (K,Na)NbO3 films on flexible metal substratescitations
- 2016Effects of strong cathodic polarization of the Ni-YSZ interfacecitations
- 2016Comparison of ultramicrotomy and focused-ion-beam for the preparation of TEM and STEM cross section of organic solar cellscitations
- 2016Conductivity and structure of sub-micrometric SrTiO 3 -YSZ compositescitations
- 2016Conductivity and structure of sub-micrometric SrTiO3-YSZ compositescitations
- 2015Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin filmscitations
- 2015Fast mass interdiffusion in ceria/alumina compositecitations
- 2015Investigation of Novel Electrocatalysts for Metal Supported Solid Oxide Fuel Cells - Ru:GDCcitations
- 2014In situ surface reduction of a NiO-YSZ-alumina composite using scanning probe microscopycitations
- 2013Oxidation in ceria infiltrated metal supported SOFCs – A TEM investigationcitations
- 2013Oxidation in ceria infiltrated metal supported SOFCs – A TEM investigationcitations
- 2013Transmission Electron Microscopy Specimen Preparation Method for Multiphase Porous Functional Ceramicscitations
- 2013Transmission Electron Microscopy Specimen Preparation Method for Multiphase Porous Functional Ceramicscitations
- 2013Infiltrated SrTiO3:FeCr‐based Anodes for Metal‐Supported SOFCcitations
- 2013Infiltrated SrTiO 3 :FeCr‐based Anodes for Metal‐Supported SOFCcitations
- 2012Durable and Robust Solid Oxide Fuel Cells
- 2012Characterization of impregnated GDC nano structures and their functionality in LSM based cathodescitations
- 2011Modifications of interface chemistry of LSM–YSZ composite by ceria nanoparticlescitations
- 2008Microstructural degradation of Ni-YSZ anodes for solid oxide fuel cells
- 2006Degradation of conductivity and microstructure under thermal and current load in Ni-YSZ cermets for SOFC anodescitations
Places of action
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article
Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin films
Abstract
The nitrogen dissociation and plasma parameters during radio frequency sputtering of lithium phosphorus oxynitride thin films in nitrogen gas are investigated by mass appearance spectrometry, electrostatic probes and optical emission spectroscopy, and the results are correlated with electrochemical properties and microstructure of the films. Low pressure and moderate power are associated with lower plasma density, higher electron temperature, higher plasma potential and larger diffusion length for sputtered particles. This combination of parameters favors the presence of more atomic nitrogen, a fact that correlates with a higher ionic conductivity. Despite of lower plasma density the film grows faster at lower pressure where the higher plasma potential, translated into higher energy for impinging ions on the substrate, resulted in a compact and smooth film structure. Higher pressures showed much less nitrogen dissociation and lower ion energy with thinner films, less ionic conductivity and poor film structure with large roughness.