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Lavareda, Guilherme
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Publications (5/5 displayed)
- 2005ITO films with enhanced electrical properties deposited on unheated ZnO-coated polymer substratescitations
- 2004Properties of ITO films deposited by plasma enhanced RTE on unheated polymer sheets - dependence on rf electrode distance from substratescitations
- 2004ITO films deposited by rf-PERTE on unheated polymer substrates - Properties dependence on In-Sn alloy compositioncitations
- 2004Enhancement of the electrical properties of ITO deposited on polymeric substrates by using a ZnO buffer layercitations
- 2002Effect of thickness on the properties of ITO thin films deposited by RF-PERTE on unheated, flexible, transparent substratescitations
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article
Properties of ITO films deposited by plasma enhanced RTE on unheated polymer sheets - dependence on rf electrode distance from substrates
Abstract
The influence of the radio frequency (rf) electrode distance from substrates on the properties of indium tin oxide (ITO) films (90 nm thick) deposited by plasma enhanced RTE onto unheated polymer substrates is studied. This distance varied in the range 6-12 cm. The polymeric substrate used was PET. Results showed that (1) an average visible transmittance of around 80% and (2) an electrical resistivity of 1.5×10-3 Ωcm are obtained for ITO films deposited on PET with the rf electrode 10 cm from substrates. On glass, the value of the electrical resistivity obtained is slightly lower ≈9×10-4 Ωcm. A study of the ITO thickness uniformity on a polymer substrate of reasonable area (15×15 cm2) revealed an uniformity of about 80%