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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Zhang, S.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (64/64 displayed)
- 2024Ion-induced field screening as a dominant factor in perovskite solar cell operational stabilitycitations
- 2024Metastable defect phase diagrams as roadmap to tailor chemically driven defect formationcitations
- 2023Magnetic indicators for evaluating plastic strains in electrical steel: Toward non-destructive assessment of the magnetic lossescitations
- 2022Study of magnetic correlations in the magnetic topological insulator (Cr,Sb)2Te3citations
- 2021Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-off
- 2021Direct ink writing of bismuth molybdate microwave dielectric ceramics
- 2021Co-hydrothermal carbonization of swine and chicken manurecitations
- 2021Amyloid-intercalated graphene oxide membranes for enhanced nanofiltrationcitations
- 2021Dopant-segregation to grain boundaries controls electrical conductivity of n-type NbCo(Pt)Sn half-Heusler alloy mediating thermoelectric performancecitations
- 2020Torrefied biomass fuels as a renewable alternative to coal in co-firing for power generationcitations
- 2020Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-offcitations
- 2020Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-off
- 2020Thermodynamic and kinetic study of synthesised graphene oxide-CuO nanocomposites: a way forward to fuel additive and photocatalytic potentialscitations
- 2020Multi-material additive manufacturing of low sintering temperature Bi2Mo2O9 ceramics with Ag floating electrodes by selective laser burnout
- 2020Large magnetoelectric coupling in multiferroic oxide heterostructures assembled via epitaxial lift-off.
- 2020Different photostability of BiVO<inf>4</inf>in near-pH-neutral electrolytescitations
- 2019High quality factor cold sintered Li2MoO4BaFe12O19 composites for microwave applicationscitations
- 2019Synthesis and Doping Strategies to Improve the Photoelectrochemical Water Oxidation Activity of BiVO<inf>4</inf> Photoanodescitations
- 2019Enhanced Photoelectrochemical Water Oxidation Performance by Fluorine Incorporation in BiVO <inf>4</inf> and Mo:BiVO <inf>4</inf> Thin Film Photoanodescitations
- 2019Dissolution of BiVO<inf>4</inf> Photoanodes Revealed by Time-Resolved Measurements under Photoelectrochemical Conditionscitations
- 2019Degradation of iridium oxides via oxygen evolution from the lattice: Correlating atomic scale structure with reaction mechanismscitations
- 2018Cold-sintered temperature stable Na0.5Bi0.5MoO4–Li2MoO4 microwave composite ceramicscitations
- 2018Superior solar-to-hydrogen energy conversion efficiency by visible light-driven hydrogen production via highly reduced Ti<sup>2+</sup>/Ti<sup>3+</sup> states in a blue titanium dioxide photocatalystcitations
- 2018Influence of luminescent graphene quantum dots on trypsin activitycitations
- 2018Why Tin-Doping Enhances the Efficiency of Hematite Photoanodes for Water Splitting—The Full Picturecitations
- 2018Reactivity tests for supplementary cementitious materials: RILEM TC 267-TRM phase 1
- 2018Atomic-scale insights into surface species of electrocatalysts in three dimensionscitations
- 2017Texture Design for Reducing Tactile Friction Independent of Sliding Orientation on Stainless Steel Sheetcitations
- 2017Texture design for light touch perceptioncitations
- 2016Oxford HEXameter: laboratory high energy X-ray diffractometer for bulk residual stress analysis
- 2016The Principle of Strain Reconstruction Tomography: Determination of Quench Strain Distribution from Diffraction Measurementscitations
- 2016Calculations of single crystal elastic constants for yttria partially stabilised zirconia from powder diffraction datacitations
- 2016Magnetic Cr doping of Bi2Se3: Evidence for divalent Cr from x-ray spectroscopycitations
- 2016A study of residual elastic strain distribution in an AZ91 Mg alloy bar loaded in four point bending
- 2016Synchrotron energy-dispersive X-ray diffraction analysis of residual strains around friction welds between dissimilar aluminium and nickel alloys
- 2016Reconstruction of axisymmetric strain distributions via neutron strain tomographycitations
- 2016Multi-scan laser forming: synchrotron strain scanning and microstructure evolutioncitations
- 2016Analytical and Numerical Investigation of Tube Compression with a Multi-Turn, Axisymmetric Coil
- 2016Towards self-healing creep resistant steels
- 2016Residual stress in laser bent steel components
- 2016Long term performance of fiber-reinforced polymers
- 2016Analysis of residual stresses around 'dimpled' cold-expanded holes in aluminum alloy platescitations
- 2016High-energy synchrotron X-ray analysis of residual plastic strains induced in shot-peened steel platescitations
- 2016Multidomain Skyrmion Lattice State in Cu₂OSeO₃citations
- 2016A beam-bending eigenstrain analysis of residual elastic strains in multi-scan laser-formed steel samplescitations
- 2015The role of the sliding direction against a grooved channel texture on tool steel: An experimental study on tactile friction:
- 2015Autonomous Repair Mechanism of Creep Damage in Fe-Au and Fe-Au-B-N Alloyscitations
- 2015Influence of thermomechanical interaction effects on the failure behaviour of polymer foam cored sandwich panels
- 2015Influence of thermomechanical interaction effects on the failure behaviour of polymer foam cored sandwich panelscitations
- 2015The effect of temperature on the failure modes of polymer foam cored sandwich structurescitations
- 2015The effect of temperature on the failure modes of polymer foam cored sandwich structurescitations
- 2015An unsupervised pattern recognition approach for AE data originating from fatigue tests on polymer–composite materials
- 2014Experimental characterization of thermomechanically induced instability in polymer foam cored sandwich structures
- 2013Mass transport to cathodes in the electrowinning of copper
- 2013Self healing by Cu precipitation in deformed Fe-Cu-B-N-C
- 2012Determination of mechanical properties of PVC foam using a modified Arcan fixture
- 2012Determination of mechanical properties of PVC foam using a modified Arcan fixture
- 2012Improved optoelectronic properties of rapid thermally annealed dilute nitride GaInNAs photodetectorscitations
- 2011Thermal degradation of polymeric foam core materials for sandwich structures
- 2010Thermomechanical interaction effects in composite sandwich structures – initial experimental analysis and derivation of mechanical properties
- 2010Photo-stability of pulsed laser deposited GexAsySe100-x-y amorphous thin filmscitations
- 2006The study of high temperature annealing of a-SiC:H films
- 2006Characterization of nanocrystalline silicon carbide filmscitations
- 2004Characterization of silicon carbide thin films prepared by VHF-PECVD technologycitations
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article
Characterization of silicon carbide thin films prepared by VHF-PECVD technology
Abstract
A series of hydrogenated amorphous silicon carbide films were prepared by plasma enhanced chemical vapor deposition (PECVD) using a gas mixture of silane, methane, and hydrogen as the reactive source and an excitation frequency of 27.12 MHz. Compared to the typical radio frequency deposition technique, the very high plasma excitation frequency increases the density of the electrons and decreases the electron temperature, which helps the dissociation of the SiH4 and CH4, and reduces the energetic ion impact on the growth surface of the thin film. Thus, dense-films with lower bulk density of states and higher growth rate are expected, as confirmed by spectroscopic ellipsometry data. Apart from that, a substantial reduction of bulk defects is achieved, allowing an improvement of the valence controllability (widening of the optical gap from about 1.9 to 3.6 eV). In this work results concerning the microstuctural and photoelectronic properties of the silicon carbide films will be discussed in detail, correlating them with the deposition process conditions used as well as with the gas phase composition of the mixtures used.