• Pierre, Dufilié
• Ventura, Pascal
• Hecht, Frédéric

Abstract

This paper proposes a new numerical coupled Finite Element Method/Boundary Integral Equations (FEM/BIE) technique which allows the 2D physical simulation of Surface Acoustic Waves (SAWs) transducers infinitely periodic in one direction. This new technique could be generalized to various periodic acoustic 2D simulations.This new method uses an original Variational Formulation (VF) which formally includes harmonic periodic boundary conditions, and, efficient boundary integral formulations allowing to account for the semi-infinite dielectric and piezoelectric spaces. In the case of the piezoelectric semi-space, the Green’s functions are efficiently computed using Fahmy–Adler’s method [8]. Only periodic boundary conditions are needed, which greatly simplifies the code implementation.This numerical model has been developed to analyze an Inter-Digital Transducer (IDT) with complex electrode shape (unburied, buried or raised electrodes). The use of buried electrodes in SAW transducer designs on quartz has important advantages when compared with unburied metal electrodes on the surface. One important property is the suppression of transverse waveguide modes in transducers. A second advantage is the ability to use thicker metal thereby reducing the resistive losses. Buried electrodes have also been shown to increase the quality factor of Surface Transverse Wave (STW) resonators [15]. This numerical model is a very useful tool for optimizing the electrode geometry. Analysis of raised electrodes is useful for predicting the effects of Reactive Ion Etch (RIE) on the SAW or STW electrical filter characteristics. RIE is commonly used as a frequency trimming technique for SAW or STW filters on Quartz.The first part of the paper presents the theory, and, the second part is devoted to numerical validations and numerical results.

Topics

• impedance spectroscopy
• surface
• theory
• simulation
• reactive