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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Keller, Stephan Urs
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (34/34 displayed)
- 2024In-situ mineralization of biomass-derived hydrogels boosts capacitive electrochemical energy storage in free-standing 3D carbon aerogelscitations
- 2022Stereolithography-Derived Three-Dimensional Pyrolytic Carbon/Mn3O4 Nanostructures for Free-Standing Hybrid Supercapacitor Electrodescitations
- 2022Selective Passivation of Three-Dimensional Carbon Microelectrodes by Polydopamine Electrodeposition and Local Laser Ablationcitations
- 2021Hot punching for loading of biodegradable microcontainers with budesonide-Soluplus filmcitations
- 2021Suspended highly 3D interdigitated carbon microelectrodescitations
- 2020Highly structured 3D pyrolytic carbon electrodes derived from additive manufacturing technologycitations
- 2019Where Is the Drug? Quantitative 3D Distribution Analyses of Confined Drug-Loaded Polymer Matricescitations
- 2019Pyrolytic carbon resonators for micromechanical thermal analysiscitations
- 2019Wafer-Scale Polymer-Based Transparent Nanocorals with Excellent Nanoplasmonic Photothermal Stability for High-Power and Superfast SERS Imagingcitations
- 2017Suspended 3D pyrolytic carbon microelectrodes for electrochemistrycitations
- 2017Suspended microstructures of epoxy based photoresists fabricated with UV photolithographycitations
- 2017High temperature SU-8 pyrolysis for fabrication of carbon electrodescitations
- 2016Bioengineering of Solution Processed Graphene for the Development of Ultrasensitive Flexible Biosensing Platform
- 2016Pyrolytic 3D Carbon Microelectrodes for Electrochemistry
- 2016Microcontainers for Intestinal Drug Delivery
- 2016Pyrolytic carbon microelectrodes for impedance based cell sensingcitations
- 2016Supercritical impregnation of polymer matrices spatially confined in microcontainers for oral drug delivery: Effect of temperature, pressure and timecitations
- 2016Synthesis and characterization of UV photocrosslinkable hydrogels with poly(N-vinyl-2-pyrrolidone): Determination of the network mesh size distributioncitations
- 2015Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplatingcitations
- 2015Microcantilever sensors for fast analysis of enzymatic degradation of poly (D, L-lactide)citations
- 2015Fabrication and loading of oral drug delivery microcontainers using hot punching
- 2015Hot punching of high-aspect-ratio 3D polymeric microstructures for drug deliverycitations
- 2014Physical characterization of photocrosslinked poly(vinyl pyrrolidone) (PVP) hydrogels for drug delivery
- 2014Micromechanical String Resonators: Analytical Tool for Thermal Characterization of Polymerscitations
- 2013Spray coating of microcontainers with eudragit using ferromagnetic shadow masks for controlled oral release of poorly water soluble drugs.
- 2013Sensitive determination of the Young's modulus of thin films by polymeric microcantileverscitations
- 2013Biodegradable microcontainers as an oral drug delivery system for poorly soluble drugs.
- 2013Ferromagnetic shadow mask for spray coating of polymer patternscitations
- 2013Process optimization of ultrasonic spray coating of polymer filmscitations
- 2012Process Optimization for Spray Coating of Poly (vinyl pyrrolidone)
- 2011Biodegradable micromechanical sensors
- 2011Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensingcitations
- 2010Double layer resist process scheme for metal lift-off with application in inductive heating of microstructurescitations
- 2008Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantileverscitations
Places of action
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article
High temperature SU-8 pyrolysis for fabrication of carbon electrodes
Abstract
In this work, we present the investigation of the pyrolysis parameters at high temperature (1100 °C) for the fabrication of two-dimensional pyrolytic carbon electrodes. The electrodes were fabricated by pyrolysis of lithographically patterned negative epoxy based photoresist SU-8. A central composite experimental design was used to identify the influence of dwell time at the highest pyrolysis temperature and heating rate on electrical, electrochemical and structural properties of the pyrolytic carbon: Van der Pauw sheet resistance measurements, cyclic voltammetry, electrochemical impedance spectroscopy and Raman spectroscopy were used to characterize the pyrolytic carbon.<br/>The results show that the temperature increase from 900 °C to 1100 °C improves the electrical and electrochemical properties. At 1100 °C, longer dwell time leads to lower resistivity, while the variation of the pyrolysis parameters has small influence on electrochemical performance.