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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cattan, Eric
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (20/20 displayed)
- 2023Modeling and control of smart material based actuator using energetic macroscopic representation
- 2022Study of a microsystem based on a nitinol wire for biomedical applications; characterization in air and in a liquid medium
- 2020Soft microelectromechanical systems and artificial muscles based on electronically conducting polymers
- 2019Dual sensing and actuation of ultrathin conducting polymer transducers
- 2019Bidirectional model for ultrathin pedot-based trilayer transducers
- 2019Integration of pedot:pss-based transducers in soft microchips
- 2018Non-linear dynamic modeling of ultrathin conducting polymer actuators including inertial effectscitations
- 2018Non-linear dynamic modeling of ultrathin conducting polymer actuators
- 2018Ultrathin electrochemically driven conducting polymer actuators: fabrication and electrochemomechanical characterizationcitations
- 2018Ultrathin electrochemically driven conducting polymer actuators: fabrication and electrochemomechanical characterizationcitations
- 2017Microfabricated PEDOT trilayer actuators: synthesis, characterization, and modelingcitations
- 2016Synergetic PEDOT degradation during a reactive ion etching processcitations
- 2006A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformationcitations
- 2005A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation
- 2005Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvestingcitations
- 2005The effect of LaNiO3 bottom electrode thickness on ferroelectric and dielectric properties of (100) oriented PbZr0.53Ti0.47O3 filmscitations
- 2003Epitaxial growth and ferroelectric properties of (115) SrBi2Nb2O9 thin films deposited by pulsed laser deposition on epitaxial (111) Pt electrodecitations
- 2002Influence of the microstructure and of an ION beam etching on the domain propagation in PZT thin filmscitations
- 2002Ferroelectric (116) SrBi2Nb2O9 thin films epitaxially grown by pulsed laser deposition on epitaxial (110) Pt/(110) SrTiO3 electrodecitations
- 2001Ferroelectric and piezoelectric properties of Nb doped PZT filmscitations
Places of action
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article
Ultrathin electrochemically driven conducting polymer actuators: fabrication and electrochemomechanical characterization
Abstract
Electronic conducting polymer based-actuators have attracted lots of interest as alternative materials to traditional piezoelectric and electrostatic actuators. Their specific characteristics such as their low operating voltages and large strains should allow them to adapt better to soft microstructures. Recently, poly (3,4-ethylenedioxythiophene) (PEDOT) – based ionic actuators have overcome some initial stumbling blocks to widespread applications in the microfabricated devices field. These trilayer bending microactuators were fabricated (i) by sequential stacking, using a layer by layer polymerization (LbL) of conducting polymer electrodes and a solid polymer electrolyte and (ii) by micro-patterning, using standard microsystems processes. While microfabrication processing of a trilayer actuator, involving no manual handling has been demonstrated, their bending performances remain limited for practical applications. Moreover, the complete characterization of their electrical, electrochemical, and mechanical properties has never been investigated. This paper describes the optimization of PEDOT electroactive electrodes synthesized with a vapor phase polymerization process. Influence of synthesis parameters on thickness, electronic conductivity and volumetric charge density were studied to determine the guidelines for synthesizing highly efficient electrodes. Afterwards, these parameters are used to guide the LbL synthesis process of ultrathin trilayer actuators. Electrochemical and mechanical properties of the resulting microactuators have been thoroughly characterized. Bending deformation and output force generation have been measured and reached 0.5% and 11 μN respectively. This constitutes the first characterization of ionic PEDOT-based microactuators operating in air of such a thin thickness (11 μm dry and 18.3 μm swelled in 1-Ethyl-3-methylimidazolium bis(fluorosulfonyl)imide (EMImTFSI)). These actuators and their actuation properties are promising for future soft microsystem devices where the use of polymer actuators should be essential.