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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Zdunek, Krzysztof
Warsaw University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2021Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditionscitations
- 2020Design of pulsed neon injection in the synthesis of W-B-C films using magnetron sputtering from a surface-sintered single powder cathodecitations
- 2020Surface sintering of tungsten powder targets designed by electromagnetic discharge: A novel approach for film synthesis in magnetron sputteringcitations
- 2019Plasmochemical investigations of DLC/WCx nanocomposite coatings synthesized by gas injection magnetron sputtering techniquecitations
- 2019Influence of annealing on electronic properties of thin AlN films deposited by magnetron sputtering method on silicon substratescitations
- 2018Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin filmscitations
- 2018Phase composition of copper nitride coatings examined by the use of X-ray diffraction and Raman spectroscopycitations
- 2018Structure and electrical resistivity dependence of molybdenum thin films deposited by dc modulated pulsed magnetron sputteringcitations
- 2017Reactive sputtering of titanium compounds using the magnetron system with a grounded cathodecitations
- 2017Multi-sided metallization of textile fibres by using magnetron system with grounded cathodecitations
- 2016Determination of sp 3 fraction in ta-C coating using XPS and Raman spectroscopy
- 2016Titanium nitride coatings synthesized by IPD method with eliminated current oscillationscitations
- 2013Plasma etching of aluminum nitride thin films prepared by magnetron sputtering method
- 2010Structure of Fe-Cu coatings prepared by the magnetron sputtering method
- 2009Electric Characterization and Selective Etching of Aluminum Oxidecitations
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article
Plasmochemical investigations of DLC/WCx nanocomposite coatings synthesized by gas injection magnetron sputtering technique
Abstract
Nanocomposite coatings of tungsten carbide incorporated into amorphous carbon (a-C/WCx) were synthesizedwith a varying amplitude of pulse pressure oscillation (0,4–0,8 Pa) on the silicon substrates through the GasInjection Magnetron Sputtering (GIMS) technique. Hence, energy distribution manner followed by changingdensity (pressure) of plasma molecules was discussed in terms of two possibilities of a tungsten-carbon phaseformation; clusters synthesis, within plasma ionizedflux and the Lifshitz model of the surface nucleation. For thispurpose, the morphology and the surface topography of deposited layers were studied by the atomic forcemicroscopy (AFM), optical emission spectroscopy (OES) and the scanning electron microscopy (SEM). Further,pronounced structural analysis provided via transmission electron microscopy (TEM) and X-ray diffraction(XRD), presents, that spherical shaped WCxnanoclusters (1–4 nm) were dispersed in the amorphous‑carbon-likehost matrix. More detailed chemical bonding state circumstances attained, that these nanocrystallites consistprimarily of metastableγ-WC1−x, and the small amount ofβ-W2C phase; embedded within the diamond-likecarbon (DLC) structure, referring to the engaged X-ray photoelectron spectroscopy (XPS) and the Ramanspectroscopy examinations. Accordingly, an application issue of the unique bonds dependence of DLC/WCxcoatings, deposited onto high speed steel substrate (SW7M) substrate, was emphasized by means of Vickersmeasurements, as a sensing microhardness feedback.