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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Maguire, Paul
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (22/22 displayed)
- 2023A Single‐Step Process to Produce Carbon Nanotube‐Zinc Compound Hybrid Materialscitations
- 2021Carrier extraction from metallic perovskite oxide nanoparticlescitations
- 2021Understanding plasma–ethanol non-equilibrium electrochemistry during the synthesis of metal oxide quantum dotscitations
- 2020The analysis of dissolved inorganic carbon in liquid using a microfluidic conductivity sensor with membrane separation of CO2citations
- 2019Nanostructured perovskite solar cells
- 2018Zero-dimensional methylammonium iodo bismuthate solar cells and synergistic interactions with silicon nanocrystalscitations
- 2018Microplasma-assisted electrochemical synthesis of Co3O4 nanoparticles in absolute ethanol for energy applicationscitations
- 2017Zero-dimensional methylammonium iodo bismuthate solar cells and synergistic interactions with silicon nanocrystalscitations
- 2017Charge carrier localised in zero-dimensional (CH 3 NH 3 ) 3 Bi 2 1 9 clusterscitations
- 2017Charge carrier localised in zero-dimensional (CH3NH3)3Bi219 clusterscitations
- 2017Charge carrier localised in zero-dimensional (CH3NH3)3Bi219 clusterscitations
- 2017Charge carrier localised in zero-dimensional (CH3NH3)3Bi2I9 clusterscitations
- 2011Structural and surface energy analysis of nitrogenated ta-C filmscitations
- 2009Electrical and Raman spectroscopic studies of vertically aligned multi-walled carbon nanotubes.citations
- 2009Substrate effects on the microstructure of hydrogenated amorphous carbon filmscitations
- 2007Intrinsic mechanical properties of ultra-thin amorphous carbon layerscitations
- 2006Measuring the thickness of ultra-thin diamond-like carbon filmscitations
- 2004Platelet adhesion on silicon modified hydrogenated amorphous carbon films.citations
- 2001Electrical characteristics of nitrogen incorporated hydrogenated amorphous carboncitations
- 2001Intrinsic stress measured on ultra-thin amorphous carbon films deposited on AFM cantileverscitations
- 2001The insulating properties of a-C:H on silicon and metal substratescitations
- 2000Nitrogen doping of amorphous DLC films by rf plasma dissociated nitrogen atom surface bombardment in a vacuumcitations
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article
Measuring the thickness of ultra-thin diamond-like carbon films
Abstract
This paper examines the challenge posed by the measurement of thickness of sub-50 nm diamond-like carbon (DLC) films deposited onto silicon substrates. We compared contact profilometry (CP), optical profilometry (OP), contact atomic force microscopy (CAFM), tapping atomic force microscopy (TAFM) and X-ray reflectometry (XRR). Generally, CP, CAFM, TAFM and XRR give similar thickness values except for the case of themore compliant samples measured by CP and CAFM. Moreover, the theoretically precise XRR technique gives significant standard deviation due to the layering of the DLC film. For those transparent samples, OP always gives an erroneous measurement. These metrological artefacts are compared to calculations of mechanical deformation (CP and CAFM), energy dissipation (TAFM) and thin film interferences (OP). The OP artefact is used to extract the film's refractive index, in good agreement with literature values. Finally, the comparative data obtained in this study also shows that the density and refractive indexof the 10 nm thick films are constituently lower than those of the 50 nm thick films. This scaling effect, which is consistent with known growth mechanisms for DLC, further complicates the measurement of thickness by optical techniques. (c) 2006 Elsevier Ltd. All rights reserved.