| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Gemmi, Mauro
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (29/29 displayed)
- 2024Ultrasound Stimulation of Piezoelectric Nanocomposite Hydrogels Boosts Chondrogenic Differentiation <i>in Vitro</i>, in Both a Normal and Inflammatory Milieu.citations
- 2023Chitosan decorated cobalt zinc ferrite nanoferrofluid composites for potential cancer hyperthermia therapy: anti-cancer activity, genotoxicity, and immunotoxicity evaluationcitations
- 2023Industrial Graphene Coating of Low-Voltage Copper Wires for Power Distributioncitations
- 2022Halide perovskites as disposable epitaxial templates for the phase-selective synthesis of lead sulfochloride nanocrystalscitations
- 2022Rapid self-healing in IR-responsive plasmonic indium tin oxide/polyketone nanocompositescitations
- 2022Supramolecular Isomerism in Cobalt(II) Coordination Polymers Built from 3,5-Bis(trifluoromethyl)benzoate and 4,4′-Bipyridinecitations
- 2022Competing phases in the room-temperature M 2 (2,6-ndc) 2 (dabco) metal-organic framework thin film synthesiscitations
- 2022Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin filmscitations
- 2022Piezoelectric nanocomposite bioink and ultrasound stimulation modulate early skeletal myogenesiscitations
- 2022Piezoelectric nanocomposite bioink and ultrasound stimulation modulate early skeletal myogenesiscitations
- 2022Industrial graphene coating of low-voltage copper wires for power distributioncitations
- 2022Rapid Self-Healing in IR-Responsive Plasmonic Indium Tin Oxide/Polyketone Nanocompositescitations
- 2022Supramolecular Isomerism in Cobalt(II) Coordination Polymers Built from 3,5-Bis(trifluoromethyl)benzoate and 4,4'-Bipyridinecitations
- 2021Titania-decorated hybrid nano-architectures and their preliminary assessment in catalytic applications
- 2021Combined Approach of Mechanochemistry and Electron Crystallography for the Discovery of 1D and 2D Coordination Polymerscitations
- 2020Structural study of decrespignyite-(Y), a complex yttrium rare earth copper carbonate chloride, by three-dimensional electron and synchrotron powder diffraction
- 2020Nanocrystals of Lead Chalcohalides:A Series of Kinetically Trapped Metastable Nanostructurescitations
- 2020Nanocrystals of Lead Chalcohalidescitations
- 2020Cs 3 Cu 4 In 2 Cl 13 Nanocrystals:A Perovskite-Related Structure with Inorganic Clusters at A Sitescitations
- 2020Cs3Cu4In2Cl13 Nanocrystalscitations
- 20193D Electron Diffraction: The Nanocrystallography Revolutioncitations
- 2018Crystal Structures of Two Important Pharmaceuticals Solved by 3D Precession Electron Diffraction Tomographycitations
- 2018Ab initio structure determination of Cu2- xTe plasmonic nanocrystals by precession-assisted electron diffraction tomography and HAADF-STEM imagingcitations
- 2018Ab Initio Structure Determination of Cu2- xTe Plasmonic Nanocrystals by Precession-Assisted Electron Diffraction Tomography and HAADF-STEM Imagingcitations
- 2017Crystal Phases in Hybrid Metal-Semiconductor Nanowire Devicescitations
- 2014An advanced lithium-ion battery based on a graphene anode and a lithium iron phosphate cathodecitations
- 2011Synthesis, crystal structure and physico-chemical properties of the new quaternary oxide Sr5BiNi2O9.6citations
- 2011Quantitative texture analysis from powder-like electron diffraction datacitations
- 2010Fe3+ spin transition in CaFe2O4 at high pressurecitations
Places of action
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article
Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films
Abstract
Interest in atomic layer deposition (ALD) processes on polymer substrates is fueled by the increasing rise of organic electronics and polymer-based nanodevices. This study provides new insights into the initial growth and interface formation during plasma-enhanced ALD (PE-ALD) of ZnO on poly ethylene glycol dimethylacrylate (pEGDMA) and poly 2-hydroxyethyl methacrylate (pHEMA) thin films, both deposited by initiated chemical vapor deposition (iCVD). In-situ spectroscopic ellipsometry showed that PE-ALD growth on the investigated polymers is a result of two competing processes: plasma etching of the polymer substrate and ZnO nucleation and growth. During the first 10–15 ALD cycles, polymer etching was found to prevail until at a certain point (depending on plasma power and type of polymer) ZnO growth takes over and the regime of linear ALD growth is entered. On pHEMA, though more sensitive to etching, ZnO film formation starts early on, whereas on pEGDMA, subsurface nucleation and island growth appear to dominate the initial stage of deposition. Despite the initial etching, resulting ZnO films are smooth and of comparable structural quality to those grown on silicon. These findings contribute to a deeper understanding of PE-ALD growth on polymers providing knowledge essential for the successful development of new processes and applications.