| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Minikayev, Roman
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2024Structural pathways for ultrafast melting of optically excited thin polycrystalline Palladium filmscitations
- 2023Luminescence mechanisms in the 2V$_2$O$_5$-xLi$_2$O-(98-x)B$_2$O$_3$ glass matrices developed for creation of glass-ceramic materialscitations
- 2021Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditionscitations
- 2021Thermostructural and Elastic Properties of PbTe and Pb0.884Cd0.116Te: A Combined Low-Temperature and High-Pressure X-ray Diffraction Study of Cd-Substitution Effectscitations
- 2021Devitrification of thin film Cu–Zr metallic glass via ultrashort pulsed laser annealingcitations
- 2021Synthesis and characterization of Gd2O3: Er3+, Yb3+ doped with Mg2+, Li+ ions—effect on the photoluminescence and biological applicationscitations
- 2021Thermostructural and Elastic Properties of PbTe and Pb 0.884 Cd 0.116 Te: A Combined Low-Temperature and High-Pressure X-ray Diffraction Study of Cd-Substitution Effectscitations
- 2019Plasmochemical investigations of DLC/WCx nanocomposite coatings synthesized by gas injection magnetron sputtering techniquecitations
- 2018Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin filmscitations
- 2018Structure and electrical resistivity dependence of molybdenum thin films deposited by dc modulated pulsed magnetron sputteringcitations
- 2014Equation of state of zircon-and scheelite-type dysprosium orthovanadates: a combined experimental and theoretical studycitations
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article
Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films
Abstract
This work reports the results of a study, concerning the synthesis of molybdenum nitride thin films, by DC Pulsed Magnetron Sputtering method (PMS), operating with 100 kHz main frequency, and modulated by the additional frequency, adjustable in the range of 10–1000 Hz (modulated Pulse Magnetron Sputtering – mPMS). We have studied the influence of mPMS on the state of plasma using optical emission spectroscopy technique (OES). X-ray photoelectron spectroscopic analysis (XPS) and X-ray diffractometry (XRD) were also used to investigate the relationship between phase composition and modulation frequency of Mo-N thin films. These investigations have revealed a presence of low-temperature phases of β-Mo16N7 and δ-MoN, confirming correlation between chemical state of Mo 3d3/2, 3d5/2 or 3p3/2 and amount of nitrogen incorporation in Mo-N structures. Films’ morphology was well examined by scanning electron microscopy (SEM) and consists the nanocrystalline/amorphous domains. From the utilitarian point of view, very good thermal stability, promising mechanical properties being: H ∼ 16 GPa, E∗ ∼ 180 GPa (NanoTest) and low value of resistivity below 650 μΩcm (4-point probe method) of the Mo-N, predestine them as an effective diffusion barrier in Cu-wired MOSFET structures. Results confirmed that additional modulation frequency should be considered as a significant factor of electric power oscillation during reactive synthesis by means of PMS-based method.